JPH0276842U - - Google Patents

Info

Publication number
JPH0276842U
JPH0276842U JP15620688U JP15620688U JPH0276842U JP H0276842 U JPH0276842 U JP H0276842U JP 15620688 U JP15620688 U JP 15620688U JP 15620688 U JP15620688 U JP 15620688U JP H0276842 U JPH0276842 U JP H0276842U
Authority
JP
Japan
Prior art keywords
plate
support unit
sides
positioning
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15620688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH062273Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15620688U priority Critical patent/JPH062273Y2/ja
Publication of JPH0276842U publication Critical patent/JPH0276842U/ja
Application granted granted Critical
Publication of JPH062273Y2 publication Critical patent/JPH062273Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP15620688U 1988-11-30 1988-11-30 板状体の収納カセット Expired - Lifetime JPH062273Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15620688U JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15620688U JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Publications (2)

Publication Number Publication Date
JPH0276842U true JPH0276842U (US20100154141A1-20100624-C00001.png) 1990-06-13
JPH062273Y2 JPH062273Y2 (ja) 1994-01-19

Family

ID=31434536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15620688U Expired - Lifetime JPH062273Y2 (ja) 1988-11-30 1988-11-30 板状体の収納カセット

Country Status (1)

Country Link
JP (1) JPH062273Y2 (US20100154141A1-20100624-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101125011B1 (ko) * 2009-07-09 2012-03-27 주식회사 선익시스템 기판 정렬용 핀세트, 기판 정렬 장치 및 이를 포함하는 박막 증착 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101125011B1 (ko) * 2009-07-09 2012-03-27 주식회사 선익시스템 기판 정렬용 핀세트, 기판 정렬 장치 및 이를 포함하는 박막 증착 장치

Also Published As

Publication number Publication date
JPH062273Y2 (ja) 1994-01-19

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