JPH0276281U - - Google Patents

Info

Publication number
JPH0276281U
JPH0276281U JP15573688U JP15573688U JPH0276281U JP H0276281 U JPH0276281 U JP H0276281U JP 15573688 U JP15573688 U JP 15573688U JP 15573688 U JP15573688 U JP 15573688U JP H0276281 U JPH0276281 U JP H0276281U
Authority
JP
Japan
Prior art keywords
drive shaft
air supply
vacuum
supply port
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15573688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15573688U priority Critical patent/JPH0276281U/ja
Publication of JPH0276281U publication Critical patent/JPH0276281U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP15573688U 1988-11-29 1988-11-29 Pending JPH0276281U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15573688U JPH0276281U (US06653308-20031125-C00197.png) 1988-11-29 1988-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15573688U JPH0276281U (US06653308-20031125-C00197.png) 1988-11-29 1988-11-29

Publications (1)

Publication Number Publication Date
JPH0276281U true JPH0276281U (US06653308-20031125-C00197.png) 1990-06-12

Family

ID=31433625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15573688U Pending JPH0276281U (US06653308-20031125-C00197.png) 1988-11-29 1988-11-29

Country Status (1)

Country Link
JP (1) JPH0276281U (US06653308-20031125-C00197.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000075544A1 (fr) * 1999-06-02 2000-12-14 Tokyo Electron Limited Clapet et appareil de traitement sous vide comportant ce clapet
JP2003042339A (ja) * 2001-07-26 2003-02-13 Anelva Corp 真空弁

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000075544A1 (fr) * 1999-06-02 2000-12-14 Tokyo Electron Limited Clapet et appareil de traitement sous vide comportant ce clapet
EP1215430A1 (en) * 1999-06-02 2002-06-19 Tokyo Electron Limited Valve and vacuum processing device with the valve
EP1215430A4 (en) * 1999-06-02 2002-10-30 Tokyo Electron Ltd VALVE AND VACUUM PROCESSING APPARATUS COMPRISING THIS VALVE
KR100605834B1 (ko) * 1999-06-02 2006-07-31 동경 엘렉트론 주식회사 진공 게이트 밸브 및 게이트 밸브를 구비한 진공 처리 장치
JP2003042339A (ja) * 2001-07-26 2003-02-13 Anelva Corp 真空弁

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