JPH0275731U - - Google Patents
Info
- Publication number
- JPH0275731U JPH0275731U JP15575388U JP15575388U JPH0275731U JP H0275731 U JPH0275731 U JP H0275731U JP 15575388 U JP15575388 U JP 15575388U JP 15575388 U JP15575388 U JP 15575388U JP H0275731 U JPH0275731 U JP H0275731U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- air
- floating chuck
- semiconductor wafer
- float
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15575388U JPH0275731U (ko) | 1988-11-29 | 1988-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15575388U JPH0275731U (ko) | 1988-11-29 | 1988-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0275731U true JPH0275731U (ko) | 1990-06-11 |
Family
ID=31433658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15575388U Pending JPH0275731U (ko) | 1988-11-29 | 1988-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0275731U (ko) |
-
1988
- 1988-11-29 JP JP15575388U patent/JPH0275731U/ja active Pending