JPH0275730U - - Google Patents
Info
- Publication number
- JPH0275730U JPH0275730U JP15508688U JP15508688U JPH0275730U JP H0275730 U JPH0275730 U JP H0275730U JP 15508688 U JP15508688 U JP 15508688U JP 15508688 U JP15508688 U JP 15508688U JP H0275730 U JPH0275730 U JP H0275730U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer holder
- transfer device
- holder
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000452 restraining effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15508688U JPH0275730U (th) | 1988-11-28 | 1988-11-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15508688U JPH0275730U (th) | 1988-11-28 | 1988-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0275730U true JPH0275730U (th) | 1990-06-11 |
Family
ID=31432393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15508688U Pending JPH0275730U (th) | 1988-11-28 | 1988-11-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0275730U (th) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010029595A1 (ja) * | 2008-09-10 | 2010-03-18 | 株式会社ハーモニック・ドライブ・システムズ | ロボットハンドおよび板状物品のハンドリング方法 |
JP2011073875A (ja) * | 2009-10-02 | 2011-04-14 | Sharp Corp | 搬送方法 |
-
1988
- 1988-11-28 JP JP15508688U patent/JPH0275730U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010029595A1 (ja) * | 2008-09-10 | 2010-03-18 | 株式会社ハーモニック・ドライブ・システムズ | ロボットハンドおよび板状物品のハンドリング方法 |
JP2011073875A (ja) * | 2009-10-02 | 2011-04-14 | Sharp Corp | 搬送方法 |