JPH0275533U - - Google Patents

Info

Publication number
JPH0275533U
JPH0275533U JP15374488U JP15374488U JPH0275533U JP H0275533 U JPH0275533 U JP H0275533U JP 15374488 U JP15374488 U JP 15374488U JP 15374488 U JP15374488 U JP 15374488U JP H0275533 U JPH0275533 U JP H0275533U
Authority
JP
Japan
Prior art keywords
photodetector
vacuum
exit
monochromator
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15374488U
Other languages
Japanese (ja)
Other versions
JPH0634659Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988153744U priority Critical patent/JPH0634659Y2/en
Publication of JPH0275533U publication Critical patent/JPH0275533U/ja
Application granted granted Critical
Publication of JPH0634659Y2 publication Critical patent/JPH0634659Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例に係る真空型分光分析
装置の構成図、第２図は従来の真空型分光分析装
置の構成図である。 １……真空型分光分析装置、２……モノクロメ
ータ、４……光検出器、６……真空室、８……回
折格子、１６……出口スリツト、２２……ピンコ
ンタクト部、４０……出口側集光レンズ、４４…
…封止材料、４６……貫通孔。 FIG. 1 is a block diagram of a vacuum spectrometer according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional vacuum spectrometer. DESCRIPTION OF SYMBOLS 1... Vacuum spectrometer, 2... Monochromator, 4... Photodetector, 6... Vacuum chamber, 8... Diffraction grating, 16... Exit slit, 22... Pin contact portion, 40... Exit side condensing lens, 44...
...Sealing material, 46...Through hole.

Claims (1)

【実用新案登録請求の範囲】 真空室内に、波長走査形のモノクロメータが配
置されるとともに、このモノクロメータの出口ス
リツトに対向して光検出器が設けられた真空型分
光分析装置において、 前記出口スリツトと光検出器との間には、この
光検出器の位置に焦点が設定された出口側集光レ
ンズが設けられる一方、前記光検出器のピンコン
タクト部が樹脂等の封止材料で封止され、その封
止部分が前記真空室の隔壁に形成された貫通孔に
嵌着されていることを特徴とする真空型分光分析
装置。[Scope of Claim for Utility Model Registration] A vacuum spectrometer in which a wavelength scanning monochromator is disposed in a vacuum chamber and a photodetector is provided opposite an exit slit of the monochromator, comprising: An exit-side condenser lens is provided between the slit and the photodetector, and the focus is set at the position of the photodetector, while the pin contact portion of the photodetector is sealed with a sealing material such as resin. 1. A vacuum spectroscopic analyzer, characterized in that the sealed portion is fitted into a through hole formed in a partition wall of the vacuum chamber.
JP1988153744U 1988-11-26 1988-11-26 Vacuum spectroscopic analyzer Expired - Fee Related JPH0634659Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153744U JPH0634659Y2 (en) 1988-11-26 1988-11-26 Vacuum spectroscopic analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153744U JPH0634659Y2 (en) 1988-11-26 1988-11-26 Vacuum spectroscopic analyzer

Publications (2)

Publication Number Publication Date
JPH0275533U true JPH0275533U (en) 1990-06-08
JPH0634659Y2 JPH0634659Y2 (en) 1994-09-07

Family

ID=31429853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153744U Expired - Fee Related JPH0634659Y2 (en) 1988-11-26 1988-11-26 Vacuum spectroscopic analyzer

Country Status (1)

Country Link
JP (1) JPH0634659Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021027033A (en) * 2020-07-08 2021-02-22 浜松ホトニクス株式会社 Ion detector, measuring device, and mass spectrometer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457074U (en) * 1977-09-27 1979-04-20
JPS5838525U (en) * 1981-09-08 1983-03-12 太陽工業株式会社 Open-top container canvas sheet
JPS61100620A (en) * 1984-10-24 1986-05-19 Union Giken:Kk Multi-wavelength spectrophotometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457074U (en) * 1977-09-27 1979-04-20
JPS5838525U (en) * 1981-09-08 1983-03-12 太陽工業株式会社 Open-top container canvas sheet
JPS61100620A (en) * 1984-10-24 1986-05-19 Union Giken:Kk Multi-wavelength spectrophotometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021027033A (en) * 2020-07-08 2021-02-22 浜松ホトニクス株式会社 Ion detector, measuring device, and mass spectrometer

Also Published As

Publication number Publication date
JPH0634659Y2 (en) 1994-09-07

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Legal Events

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