JPH0275116U - - Google Patents

Info

Publication number
JPH0275116U
JPH0275116U JP15331988U JP15331988U JPH0275116U JP H0275116 U JPH0275116 U JP H0275116U JP 15331988 U JP15331988 U JP 15331988U JP 15331988 U JP15331988 U JP 15331988U JP H0275116 U JPH0275116 U JP H0275116U
Authority
JP
Japan
Prior art keywords
clean gas
gas outlet
chamber
casing
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15331988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15331988U priority Critical patent/JPH0275116U/ja
Publication of JPH0275116U publication Critical patent/JPH0275116U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP15331988U 1988-11-25 1988-11-25 Pending JPH0275116U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15331988U JPH0275116U (zh) 1988-11-25 1988-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15331988U JPH0275116U (zh) 1988-11-25 1988-11-25

Publications (1)

Publication Number Publication Date
JPH0275116U true JPH0275116U (zh) 1990-06-08

Family

ID=31429051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15331988U Pending JPH0275116U (zh) 1988-11-25 1988-11-25

Country Status (1)

Country Link
JP (1) JPH0275116U (zh)

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