JPH0274364U - - Google Patents
Info
- Publication number
- JPH0274364U JPH0274364U JP15316388U JP15316388U JPH0274364U JP H0274364 U JPH0274364 U JP H0274364U JP 15316388 U JP15316388 U JP 15316388U JP 15316388 U JP15316388 U JP 15316388U JP H0274364 U JPH0274364 U JP H0274364U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotating shaft
- substrate holder
- integrally
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例を示す断面図、第
２図は、従来のものを示す断面図である。
尚、図中１は基板ホルダー、２は固定ピン、３
は基板加熱ヒータ固定板、４はヒータ導入機、５
はベアリング、６は回転導入機、７は回転軸、８
はボルト部、９は基板加熱ヒータ、１０はハウジ
ングである。
FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional one. In the figure, 1 is the board holder, 2 is the fixing pin, and 3 is the board holder.
4 is the substrate heating heater fixing plate, 4 is the heater introducing machine, and 5 is the heater fixing plate for heating the substrate.
is a bearing, 6 is a rotation introducing machine, 7 is a rotating shaft, 8
1 is a bolt portion, 9 is a substrate heater, and 10 is a housing.
Claims (1)
定ピンの挿入により同回転軸と一体回転可能に結
合するとともに、前記基板ホルダーにベアリング
を介して基板加熱ヒータを相対回転可能で、且つ
一体に上下動可能に支持したことを特徴とする基
板加熱装置。 The substrate holder is connected to the rotating shaft so that it can move up and down and can rotate integrally with the rotating shaft by inserting a fixing pin, and the substrate heater can be relatively rotated to the substrate holder via a bearing and can be moved up and down integrally. A substrate heating device characterized by being movably supported.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15316388U JPH0274364U (en) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15316388U JPH0274364U (en) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274364U true JPH0274364U (en) | 1990-06-06 |
Family
ID=31428754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15316388U Pending JPH0274364U (en) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274364U (en) |
-
1988
- 1988-11-25 JP JP15316388U patent/JPH0274364U/ja active Pending
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