JPH0274364U - - Google Patents

Info

Publication number
JPH0274364U
JPH0274364U JP15316388U JP15316388U JPH0274364U JP H0274364 U JPH0274364 U JP H0274364U JP 15316388 U JP15316388 U JP 15316388U JP 15316388 U JP15316388 U JP 15316388U JP H0274364 U JPH0274364 U JP H0274364U
Authority
JP
Japan
Prior art keywords
substrate
rotating shaft
substrate holder
integrally
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15316388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15316388U priority Critical patent/JPH0274364U/ja
Publication of JPH0274364U publication Critical patent/JPH0274364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15316388U 1988-11-25 1988-11-25 Pending JPH0274364U (US20100154141A1-20100624-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15316388U JPH0274364U (US20100154141A1-20100624-C00001.png) 1988-11-25 1988-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15316388U JPH0274364U (US20100154141A1-20100624-C00001.png) 1988-11-25 1988-11-25

Publications (1)

Publication Number Publication Date
JPH0274364U true JPH0274364U (US20100154141A1-20100624-C00001.png) 1990-06-06

Family

ID=31428754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15316388U Pending JPH0274364U (US20100154141A1-20100624-C00001.png) 1988-11-25 1988-11-25

Country Status (1)

Country Link
JP (1) JPH0274364U (US20100154141A1-20100624-C00001.png)

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