JPH0274361U - - Google Patents

Info

Publication number
JPH0274361U
JPH0274361U JP15258788U JP15258788U JPH0274361U JP H0274361 U JPH0274361 U JP H0274361U JP 15258788 U JP15258788 U JP 15258788U JP 15258788 U JP15258788 U JP 15258788U JP H0274361 U JPH0274361 U JP H0274361U
Authority
JP
Japan
Prior art keywords
magnet
back side
sno
target
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15258788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15258788U priority Critical patent/JPH0274361U/ja
Publication of JPH0274361U publication Critical patent/JPH0274361U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15258788U 1988-11-25 1988-11-25 Pending JPH0274361U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15258788U JPH0274361U (US20020051482A1-20020502-M00012.png) 1988-11-25 1988-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15258788U JPH0274361U (US20020051482A1-20020502-M00012.png) 1988-11-25 1988-11-25

Publications (1)

Publication Number Publication Date
JPH0274361U true JPH0274361U (US20020051482A1-20020502-M00012.png) 1990-06-06

Family

ID=31427650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15258788U Pending JPH0274361U (US20020051482A1-20020502-M00012.png) 1988-11-25 1988-11-25

Country Status (1)

Country Link
JP (1) JPH0274361U (US20020051482A1-20020502-M00012.png)

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