JPH0274174U - - Google Patents

Info

Publication number
JPH0274174U
JPH0274174U JP15383088U JP15383088U JPH0274174U JP H0274174 U JPH0274174 U JP H0274174U JP 15383088 U JP15383088 U JP 15383088U JP 15383088 U JP15383088 U JP 15383088U JP H0274174 U JPH0274174 U JP H0274174U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
space
suctioned
vacuum
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15383088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15383088U priority Critical patent/JPH0274174U/ja
Publication of JPH0274174U publication Critical patent/JPH0274174U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP15383088U 1988-11-25 1988-11-25 Pending JPH0274174U (US20050065096A1-20050324-C00034.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15383088U JPH0274174U (US20050065096A1-20050324-C00034.png) 1988-11-25 1988-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15383088U JPH0274174U (US20050065096A1-20050324-C00034.png) 1988-11-25 1988-11-25

Publications (1)

Publication Number Publication Date
JPH0274174U true JPH0274174U (US20050065096A1-20050324-C00034.png) 1990-06-06

Family

ID=31430017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15383088U Pending JPH0274174U (US20050065096A1-20050324-C00034.png) 1988-11-25 1988-11-25

Country Status (1)

Country Link
JP (1) JPH0274174U (US20050065096A1-20050324-C00034.png)

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