JPH0274162U - - Google Patents

Info

Publication number
JPH0274162U
JPH0274162U JP15194088U JP15194088U JPH0274162U JP H0274162 U JPH0274162 U JP H0274162U JP 15194088 U JP15194088 U JP 15194088U JP 15194088 U JP15194088 U JP 15194088U JP H0274162 U JPH0274162 U JP H0274162U
Authority
JP
Japan
Prior art keywords
substrate
friction roller
backup
separate
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15194088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0645325Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15194088U priority Critical patent/JPH0645325Y2/ja
Publication of JPH0274162U publication Critical patent/JPH0274162U/ja
Application granted granted Critical
Publication of JPH0645325Y2 publication Critical patent/JPH0645325Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15194088U 1988-11-22 1988-11-22 基板の表面処理装置 Expired - Lifetime JPH0645325Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15194088U JPH0645325Y2 (ja) 1988-11-22 1988-11-22 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15194088U JPH0645325Y2 (ja) 1988-11-22 1988-11-22 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0274162U true JPH0274162U (US06262066-20010717-C00315.png) 1990-06-06
JPH0645325Y2 JPH0645325Y2 (ja) 1994-11-24

Family

ID=31426430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15194088U Expired - Lifetime JPH0645325Y2 (ja) 1988-11-22 1988-11-22 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JPH0645325Y2 (US06262066-20010717-C00315.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009018410A (ja) * 2007-06-15 2009-01-29 Ishii Hyoki Corp 研磨装置及び研磨方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009018410A (ja) * 2007-06-15 2009-01-29 Ishii Hyoki Corp 研磨装置及び研磨方法

Also Published As

Publication number Publication date
JPH0645325Y2 (ja) 1994-11-24

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