JPH0273733U - - Google Patents
Info
- Publication number
- JPH0273733U JPH0273733U JP15348988U JP15348988U JPH0273733U JP H0273733 U JPH0273733 U JP H0273733U JP 15348988 U JP15348988 U JP 15348988U JP 15348988 U JP15348988 U JP 15348988U JP H0273733 U JPH0273733 U JP H0273733U
- Authority
- JP
- Japan
- Prior art keywords
- holding
- wafer
- rods
- holding device
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 24
- 230000000903 blocking effect Effects 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000001105 regulatory effect Effects 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153489U JPH0632679Y2 (ja) | 1988-11-28 | 1988-11-28 | ウエーハ保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153489U JPH0632679Y2 (ja) | 1988-11-28 | 1988-11-28 | ウエーハ保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0273733U true JPH0273733U (th) | 1990-06-05 |
| JPH0632679Y2 JPH0632679Y2 (ja) | 1994-08-24 |
Family
ID=31429374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988153489U Expired - Fee Related JPH0632679Y2 (ja) | 1988-11-28 | 1988-11-28 | ウエーハ保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632679Y2 (th) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS434952Y1 (th) * | 1965-03-03 | 1968-03-02 | ||
| JPS5067558A (th) * | 1973-10-15 | 1975-06-06 | ||
| JPS5878423A (ja) * | 1981-10-16 | 1983-05-12 | ヘルムト・ザイエル・ゲ−エムベ−ハ− | 半導体物品の熱処理方法及びその装置 |
-
1988
- 1988-11-28 JP JP1988153489U patent/JPH0632679Y2/ja not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS434952Y1 (th) * | 1965-03-03 | 1968-03-02 | ||
| JPS5067558A (th) * | 1973-10-15 | 1975-06-06 | ||
| JPS5878423A (ja) * | 1981-10-16 | 1983-05-12 | ヘルムト・ザイエル・ゲ−エムベ−ハ− | 半導体物品の熱処理方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632679Y2 (ja) | 1994-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |