JPH02730U - - Google Patents
Info
- Publication number
- JPH02730U JPH02730U JP7895188U JP7895188U JPH02730U JP H02730 U JPH02730 U JP H02730U JP 7895188 U JP7895188 U JP 7895188U JP 7895188 U JP7895188 U JP 7895188U JP H02730 U JPH02730 U JP H02730U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- wafer
- tweezers
- pipe
- wafer tweezers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7895188U JPH02730U (enExample) | 1988-06-14 | 1988-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7895188U JPH02730U (enExample) | 1988-06-14 | 1988-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02730U true JPH02730U (enExample) | 1990-01-05 |
Family
ID=31303839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7895188U Pending JPH02730U (enExample) | 1988-06-14 | 1988-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02730U (enExample) |
-
1988
- 1988-06-14 JP JP7895188U patent/JPH02730U/ja active Pending