JPH0272546U - - Google Patents

Info

Publication number
JPH0272546U
JPH0272546U JP15275388U JP15275388U JPH0272546U JP H0272546 U JPH0272546 U JP H0272546U JP 15275388 U JP15275388 U JP 15275388U JP 15275388 U JP15275388 U JP 15275388U JP H0272546 U JPH0272546 U JP H0272546U
Authority
JP
Japan
Prior art keywords
case
lid
container
utility
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15275388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15275388U priority Critical patent/JPH0272546U/ja
Publication of JPH0272546U publication Critical patent/JPH0272546U/ja
Pending legal-status Critical Current

Links

JP15275388U 1988-11-22 1988-11-22 Pending JPH0272546U (US07122547-20061017-C00273.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15275388U JPH0272546U (US07122547-20061017-C00273.png) 1988-11-22 1988-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15275388U JPH0272546U (US07122547-20061017-C00273.png) 1988-11-22 1988-11-22

Publications (1)

Publication Number Publication Date
JPH0272546U true JPH0272546U (US07122547-20061017-C00273.png) 1990-06-01

Family

ID=31427963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15275388U Pending JPH0272546U (US07122547-20061017-C00273.png) 1988-11-22 1988-11-22

Country Status (1)

Country Link
JP (1) JPH0272546U (US07122547-20061017-C00273.png)

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