JPH0272533U - - Google Patents
Info
- Publication number
- JPH0272533U JPH0272533U JP15275088U JP15275088U JPH0272533U JP H0272533 U JPH0272533 U JP H0272533U JP 15275088 U JP15275088 U JP 15275088U JP 15275088 U JP15275088 U JP 15275088U JP H0272533 U JPH0272533 U JP H0272533U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- liquid
- tank
- semiconductor substrate
- circulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15275088U JPH0272533U (cs) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15275088U JPH0272533U (cs) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272533U true JPH0272533U (cs) | 1990-06-01 |
Family
ID=31427957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15275088U Pending JPH0272533U (cs) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272533U (cs) |
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1988
- 1988-11-22 JP JP15275088U patent/JPH0272533U/ja active Pending