JPH0272529U - - Google Patents

Info

Publication number
JPH0272529U
JPH0272529U JP15224588U JP15224588U JPH0272529U JP H0272529 U JPH0272529 U JP H0272529U JP 15224588 U JP15224588 U JP 15224588U JP 15224588 U JP15224588 U JP 15224588U JP H0272529 U JPH0272529 U JP H0272529U
Authority
JP
Japan
Prior art keywords
radius
wafer
contour
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15224588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15224588U priority Critical patent/JPH0272529U/ja
Publication of JPH0272529U publication Critical patent/JPH0272529U/ja
Pending legal-status Critical Current

Links

JP15224588U 1988-11-22 1988-11-22 Pending JPH0272529U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15224588U JPH0272529U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15224588U JPH0272529U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Publications (1)

Publication Number Publication Date
JPH0272529U true JPH0272529U (enrdf_load_stackoverflow) 1990-06-01

Family

ID=31427000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15224588U Pending JPH0272529U (enrdf_load_stackoverflow) 1988-11-22 1988-11-22

Country Status (1)

Country Link
JP (1) JPH0272529U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012051743A (ja) * 2010-08-31 2012-03-15 Showa Denko Kk ウェーハ、半導体発光素子用テンプレート基板の製造方法、半導体発光素子基板の製造方法、半導体発光素子用テンプレート基板、半導体発光素子基板及びレジスト塗布方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012051743A (ja) * 2010-08-31 2012-03-15 Showa Denko Kk ウェーハ、半導体発光素子用テンプレート基板の製造方法、半導体発光素子基板の製造方法、半導体発光素子用テンプレート基板、半導体発光素子基板及びレジスト塗布方法

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