JPH0272529U - - Google Patents
Info
- Publication number
- JPH0272529U JPH0272529U JP15224588U JP15224588U JPH0272529U JP H0272529 U JPH0272529 U JP H0272529U JP 15224588 U JP15224588 U JP 15224588U JP 15224588 U JP15224588 U JP 15224588U JP H0272529 U JPH0272529 U JP H0272529U
- Authority
- JP
- Japan
- Prior art keywords
- radius
- wafer
- contour
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15224588U JPH0272529U (cs) | 1988-11-22 | 1988-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15224588U JPH0272529U (cs) | 1988-11-22 | 1988-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272529U true JPH0272529U (cs) | 1990-06-01 |
Family
ID=31427000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15224588U Pending JPH0272529U (cs) | 1988-11-22 | 1988-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272529U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012051743A (ja) * | 2010-08-31 | 2012-03-15 | Showa Denko Kk | ウェーハ、半導体発光素子用テンプレート基板の製造方法、半導体発光素子基板の製造方法、半導体発光素子用テンプレート基板、半導体発光素子基板及びレジスト塗布方法 |
-
1988
- 1988-11-22 JP JP15224588U patent/JPH0272529U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012051743A (ja) * | 2010-08-31 | 2012-03-15 | Showa Denko Kk | ウェーハ、半導体発光素子用テンプレート基板の製造方法、半導体発光素子基板の製造方法、半導体発光素子用テンプレート基板、半導体発光素子基板及びレジスト塗布方法 |