JPH02719U - - Google Patents
Info
- Publication number
- JPH02719U JPH02719U JP7837288U JP7837288U JPH02719U JP H02719 U JPH02719 U JP H02719U JP 7837288 U JP7837288 U JP 7837288U JP 7837288 U JP7837288 U JP 7837288U JP H02719 U JPH02719 U JP H02719U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- quartz
- wafer
- quartz boat
- support points
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7837288U JPH02719U (th) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7837288U JPH02719U (th) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02719U true JPH02719U (th) | 1990-01-05 |
Family
ID=31303301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7837288U Pending JPH02719U (th) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02719U (th) |
-
1988
- 1988-06-15 JP JP7837288U patent/JPH02719U/ja active Pending