JPH0270954U - - Google Patents
Info
- Publication number
- JPH0270954U JPH0270954U JP15100488U JP15100488U JPH0270954U JP H0270954 U JPH0270954 U JP H0270954U JP 15100488 U JP15100488 U JP 15100488U JP 15100488 U JP15100488 U JP 15100488U JP H0270954 U JPH0270954 U JP H0270954U
- Authority
- JP
- Japan
- Prior art keywords
- angle
- transfer arm
- arm
- rotates
- cam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Positioning Apparatuses (AREA)
- Automatic Assembly (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15100488U JPH0533247Y2 (https=) | 1988-11-18 | 1988-11-18 | |
| US07/421,351 US5052884A (en) | 1988-10-25 | 1989-10-13 | Transferring device for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15100488U JPH0533247Y2 (https=) | 1988-11-18 | 1988-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0270954U true JPH0270954U (https=) | 1990-05-30 |
| JPH0533247Y2 JPH0533247Y2 (https=) | 1993-08-24 |
Family
ID=31424660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15100488U Expired - Lifetime JPH0533247Y2 (https=) | 1988-10-25 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533247Y2 (https=) |
-
1988
- 1988-11-18 JP JP15100488U patent/JPH0533247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533247Y2 (https=) | 1993-08-24 |