JPH0270954U - - Google Patents

Info

Publication number
JPH0270954U
JPH0270954U JP15100488U JP15100488U JPH0270954U JP H0270954 U JPH0270954 U JP H0270954U JP 15100488 U JP15100488 U JP 15100488U JP 15100488 U JP15100488 U JP 15100488U JP H0270954 U JPH0270954 U JP H0270954U
Authority
JP
Japan
Prior art keywords
angle
transfer arm
arm
rotates
cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15100488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533247Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15100488U priority Critical patent/JPH0533247Y2/ja
Priority to US07/421,351 priority patent/US5052884A/en
Publication of JPH0270954U publication Critical patent/JPH0270954U/ja
Application granted granted Critical
Publication of JPH0533247Y2 publication Critical patent/JPH0533247Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Positioning Apparatuses (AREA)
  • Automatic Assembly (AREA)
JP15100488U 1988-10-25 1988-11-18 Expired - Lifetime JPH0533247Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15100488U JPH0533247Y2 (enrdf_load_stackoverflow) 1988-11-18 1988-11-18
US07/421,351 US5052884A (en) 1988-10-25 1989-10-13 Transferring device for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15100488U JPH0533247Y2 (enrdf_load_stackoverflow) 1988-11-18 1988-11-18

Publications (2)

Publication Number Publication Date
JPH0270954U true JPH0270954U (enrdf_load_stackoverflow) 1990-05-30
JPH0533247Y2 JPH0533247Y2 (enrdf_load_stackoverflow) 1993-08-24

Family

ID=31424660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15100488U Expired - Lifetime JPH0533247Y2 (enrdf_load_stackoverflow) 1988-10-25 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0533247Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0533247Y2 (enrdf_load_stackoverflow) 1993-08-24

Similar Documents

Publication Publication Date Title
JPH0270954U (enrdf_load_stackoverflow)
JPS62150087U (enrdf_load_stackoverflow)
JPH0217553U (enrdf_load_stackoverflow)
JPS6150934U (enrdf_load_stackoverflow)
JPH0373523U (enrdf_load_stackoverflow)
JPS6420733U (enrdf_load_stackoverflow)
JPH042692U (enrdf_load_stackoverflow)
JPH01176626U (enrdf_load_stackoverflow)
JPH0239847U (enrdf_load_stackoverflow)
JPH0440053U (enrdf_load_stackoverflow)
JPS62172530U (enrdf_load_stackoverflow)
JPH0280622U (enrdf_load_stackoverflow)
JPS6318270U (enrdf_load_stackoverflow)
JPS6268921U (enrdf_load_stackoverflow)
JPS63100438U (enrdf_load_stackoverflow)
JPH01143636U (enrdf_load_stackoverflow)
JPS62103248U (enrdf_load_stackoverflow)
JPS61113734U (enrdf_load_stackoverflow)
JPS58196313U (ja) 位置決め装置
JPS61185531U (enrdf_load_stackoverflow)
JPS64558U (enrdf_load_stackoverflow)
JPH02130785U (enrdf_load_stackoverflow)
JPH03130226U (enrdf_load_stackoverflow)
JPH03112942U (enrdf_load_stackoverflow)
JPH03107551U (enrdf_load_stackoverflow)