JPH0270461U - - Google Patents
Info
- Publication number
- JPH0270461U JPH0270461U JP14987188U JP14987188U JPH0270461U JP H0270461 U JPH0270461 U JP H0270461U JP 14987188 U JP14987188 U JP 14987188U JP 14987188 U JP14987188 U JP 14987188U JP H0270461 U JPH0270461 U JP H0270461U
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- film
- aluminum
- titanium film
- barrier metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14987188U JPH0648880Y2 (ja) | 1988-11-16 | 1988-11-16 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14987188U JPH0648880Y2 (ja) | 1988-11-16 | 1988-11-16 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0270461U true JPH0270461U (da) | 1990-05-29 |
| JPH0648880Y2 JPH0648880Y2 (ja) | 1994-12-12 |
Family
ID=31422499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14987188U Expired - Lifetime JPH0648880Y2 (ja) | 1988-11-16 | 1988-11-16 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648880Y2 (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04264719A (ja) * | 1991-02-19 | 1992-09-21 | Sony Corp | 配線形成方法 |
-
1988
- 1988-11-16 JP JP14987188U patent/JPH0648880Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04264719A (ja) * | 1991-02-19 | 1992-09-21 | Sony Corp | 配線形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648880Y2 (ja) | 1994-12-12 |