JPH0269961U - - Google Patents
Info
- Publication number
- JPH0269961U JPH0269961U JP14909488U JP14909488U JPH0269961U JP H0269961 U JPH0269961 U JP H0269961U JP 14909488 U JP14909488 U JP 14909488U JP 14909488 U JP14909488 U JP 14909488U JP H0269961 U JPH0269961 U JP H0269961U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- pass
- attached
- outer cover
- evaporation tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000011362 coarse particle Substances 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Description
第１図は本考案の蒸着用ボートの一実施例の蒸
発槽部と蓋部とを分解して記載した図、第２図は
第１図に示された蒸着用ボートの各構成部材が所
定の位置に重ね合わされた時の―線矢示方向
断面図、第３図及び第４図は従来の蒸着用ボート
を示す図である。
１，３２，４２……蒸発槽部、２，２′，３１
，４１……蒸発層リード部、３……外蓋、４，３
４……蒸発口、５……メツシユ中蓋、５ａ……メ
ツシユ、５ｂ……フレーム、７，７′……外蓋リ
ード部。
FIG. 1 is an exploded view of the evaporation tank and lid of an embodiment of the evaporation boat of the present invention, and FIG. 2 shows each component of the evaporation boat shown in FIG. FIGS. 3 and 4 are cross-sectional views in the direction indicated by the line arrow ``-'' when superimposed at the position , and are views showing a conventional vapor deposition boat. 1, 32, 42...evaporation tank section, 2, 2', 31
, 41... Evaporation layer lead part, 3... Outer cover, 4, 3
4... Evaporation port, 5... Mesh inner lid, 5a... Mesh, 5b... Frame, 7, 7'... Outer lid lead part.
Claims (1)
られ蒸発口を有する外蓋と、前記外蓋の内側に所
定間隙をもつて取付けられ蒸発気体のみを選択的
に通過させ粗大粒子の通過を規制するメツシユ部
とから成ることを特徴とする蒸着用ボート。 an evaporation tank section, an outer lid that is attached to the open end of the evaporation tank section and has an evaporation port; and an outer cover that is attached to the inside of the outer cover with a predetermined gap to selectively allow only evaporated gas to pass through and coarse particles to pass through. A vapor deposition boat characterized by comprising: a mesh section for regulating the
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14909488U JPH0269961U (en) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14909488U JPH0269961U (en) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0269961U true JPH0269961U (en) | 1990-05-28 |
Family
ID=31421012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14909488U Pending JPH0269961U (en) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0269961U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004137583A (en) * | 2002-10-21 | 2004-05-13 | Tohoku Pioneer Corp | Vacuum deposition device |
| JP2005200767A (en) * | 2004-01-14 | 2005-07-28 | Applied Films Gmbh & Co Kg | Evaporator for sublimable material |
-
1988
- 1988-11-17 JP JP14909488U patent/JPH0269961U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004137583A (en) * | 2002-10-21 | 2004-05-13 | Tohoku Pioneer Corp | Vacuum deposition device |
| JP2005200767A (en) * | 2004-01-14 | 2005-07-28 | Applied Films Gmbh & Co Kg | Evaporator for sublimable material |