JPH0269325U - - Google Patents
Info
- Publication number
- JPH0269325U JPH0269325U JP14746888U JP14746888U JPH0269325U JP H0269325 U JPH0269325 U JP H0269325U JP 14746888 U JP14746888 U JP 14746888U JP 14746888 U JP14746888 U JP 14746888U JP H0269325 U JPH0269325 U JP H0269325U
- Authority
- JP
- Japan
- Prior art keywords
- upper frame
- frame
- vacuum
- mask film
- vacuum opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
Description
第１図は本考案実施例の縦切断正面図、第２図
は第１図におけるＡ―Ａ線の断面図、第３図は従
来の露光装置用焼枠の縦断面図である。
１…上枠、２…字形溝、４…真空引き口、５
…ガスケツト、６…アクリル補助板、６ａ，６ｂ
，６ｃ…真空引き穴、７…マスクフイルム、８…
真空穴、８ａ，８ｂ，８Ｃ…通路穴、９…溝縁、
１０…ワーク、１１…下枠。
FIG. 1 is a longitudinally sectioned front view of an embodiment of the present invention, FIG. 2 is a sectional view taken along line A--A in FIG. 1, and FIG. 3 is a longitudinal sectional view of a conventional printing frame for an exposure apparatus. 1... Upper frame, 2... Letter-shaped groove, 4... Vacuum opening, 5
...Gasket, 6...Acrylic auxiliary plate, 6a, 6b
, 6c...vacuum hole, 7...mask film, 8...
Vacuum hole, 8a, 8b, 8C... passage hole, 9... groove edge,
10...Work, 11...Lower frame.
Claims (1)
枠と、該上枠の真空引口からの吸引力によつて該
上枠に密着するマスクフイルムと、前記上枠の周
縁に固着されて前記下枠との空間を真空可能にす
るガスケツトとを備えたものにおいて、 前記上枠の真空引口と連通する真空穴を厚さ方
向に形成したアクリル補助板が前記上枠に吸着す
べき小形マスクフイルムの保持部材として附加さ
れて成ることを特徴とする露光装置の焼枠。[Claims for Utility Model Registration] A lower frame and an upper frame each having a vacuum opening, a mask film that is brought into close contact with the upper frame by the suction force from the vacuum opening of the upper frame, and the upper frame. an acrylic auxiliary plate having a vacuum hole formed in the thickness direction that communicates with the vacuum outlet of the upper frame; A printing frame for an exposure apparatus, which is added as a holding member for a small mask film to be adsorbed to the frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988147468U JPH0645951Y2 (en) | 1988-11-11 | 1988-11-11 | Burning frame of exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988147468U JPH0645951Y2 (en) | 1988-11-11 | 1988-11-11 | Burning frame of exposure equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0269325U true JPH0269325U (en) | 1990-05-25 |
| JPH0645951Y2 JPH0645951Y2 (en) | 1994-11-24 |
Family
ID=31417895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988147468U Expired - Lifetime JPH0645951Y2 (en) | 1988-11-11 | 1988-11-11 | Burning frame of exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645951Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147624A (en) * | 1981-03-09 | 1982-09-11 | Canon Inc | Contact exposure device |
-
1988
- 1988-11-11 JP JP1988147468U patent/JPH0645951Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147624A (en) * | 1981-03-09 | 1982-09-11 | Canon Inc | Contact exposure device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645951Y2 (en) | 1994-11-24 |