JPH0267637U - - Google Patents

Info

Publication number
JPH0267637U
JPH0267637U JP14662288U JP14662288U JPH0267637U JP H0267637 U JPH0267637 U JP H0267637U JP 14662288 U JP14662288 U JP 14662288U JP 14662288 U JP14662288 U JP 14662288U JP H0267637 U JPH0267637 U JP H0267637U
Authority
JP
Japan
Prior art keywords
microwave
waveguide
tube
sample
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14662288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0617284Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14662288U priority Critical patent/JPH0617284Y2/ja
Publication of JPH0267637U publication Critical patent/JPH0267637U/ja
Application granted granted Critical
Publication of JPH0617284Y2 publication Critical patent/JPH0617284Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14662288U 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置 Expired - Lifetime JPH0617284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14662288U JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14662288U JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH0267637U true JPH0267637U (US06534493-20030318-C00166.png) 1990-05-22
JPH0617284Y2 JPH0617284Y2 (ja) 1994-05-02

Family

ID=31416283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14662288U Expired - Lifetime JPH0617284Y2 (ja) 1988-11-11 1988-11-11 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0617284Y2 (US06534493-20030318-C00166.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076895A (ja) * 1993-12-17 1995-01-10 Hitachi Ltd マイクロ波プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076895A (ja) * 1993-12-17 1995-01-10 Hitachi Ltd マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPH0617284Y2 (ja) 1994-05-02

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