JPH0267183U - - Google Patents
Info
- Publication number
- JPH0267183U JPH0267183U JP14747788U JP14747788U JPH0267183U JP H0267183 U JPH0267183 U JP H0267183U JP 14747788 U JP14747788 U JP 14747788U JP 14747788 U JP14747788 U JP 14747788U JP H0267183 U JPH0267183 U JP H0267183U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- valve
- chamber
- valve support
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 description 1
Description
第１図乃至第４図は夫々本考案の一実施例を示
す断面図、第５図は従来の真空弁装置の一例を示
す図である。
１：チヤンバー、１ａ：チヤンバー側壁、２ａ
，２ｂ：開口、３：弁支持体、４：弁座、５：弁
体、６：シヤフト、７：駆動機構、８：ベローズ
、９：パイプ、１０：切換バルブ、１１：加圧空
気源、１２：ピストン、１３：シリンダー、１４
：パイプ、１５：切換バルブ、１６：真空シール
用ベローズ、１７：第１ベローズ、１８：第２ベ
ローズ、１９：フランジ、２０：ストツパー。
1 to 4 are sectional views each showing an embodiment of the present invention, and FIG. 5 is a view showing an example of a conventional vacuum valve device. 1: Chamber, 1a: Chamber side wall, 2a
, 2b: opening, 3: valve support, 4: valve seat, 5: valve body, 6: shaft, 7: drive mechanism, 8: bellows, 9: pipe, 10: switching valve, 11: pressurized air source, 12: Piston, 13: Cylinder, 14
: Pipe, 15: Switching valve, 16: Vacuum sealing bellows, 17: First bellows, 18: Second bellows, 19: Flange, 20: Stopper.
Claims (1)
の一方の端部開口を塞ぐフランジと、該フランジ
と第１ベローズによつて接続され前記チヤンバー
の長手方向に移動可能な弁支持体と、チヤンバー
の他方の端部に形成される底部若しくはその近傍
の側面に開けられた複数の開口の少なくとも一つ
の開口の周囲に形成された弁座と、弁支持体に第
２ベローズを介して接続され弁座を塞ぐ弁体と、
弁支持体に形成される通路により連通した第１ベ
ローズと第２ベローズの内側空間の圧力を調整す
る手段を設け、第１ベローズのバネ強さＫ１、第
２ベローズのバネ強さＫ２としたとき、Ｋ１＜Ｋ
２の関係を満足するように構成したことを特徴と
する真空弁装置。 a chamber forming a columnar space; a flange closing an opening at one end of the chamber; a valve support connected to the flange by a first bellows and movable in the longitudinal direction of the chamber; and the other end of the chamber. a valve seat formed around at least one of a plurality of openings formed in the bottom part or a side surface in the vicinity thereof; and a valve connected to the valve support body via a second bellows to close the valve seat. body and
When a means is provided for adjusting the pressure in the inner space of the first bellows and the second bellows that communicate through a passage formed in the valve support body, and the spring strength of the first bellows is K1 and the spring strength of the second bellows is K2. , K1<K
A vacuum valve device characterized in that it is configured to satisfy the following relationship.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14747788U JPH0267183U (en) | 1988-11-11 | 1988-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14747788U JPH0267183U (en) | 1988-11-11 | 1988-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267183U true JPH0267183U (en) | 1990-05-21 |
Family
ID=31417912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14747788U Pending JPH0267183U (en) | 1988-11-11 | 1988-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267183U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993023691A1 (en) * | 1992-05-15 | 1993-11-25 | Ebara Corporation | Gate valve |
-
1988
- 1988-11-11 JP JP14747788U patent/JPH0267183U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993023691A1 (en) * | 1992-05-15 | 1993-11-25 | Ebara Corporation | Gate valve |