JPH0266681U - - Google Patents

Info

Publication number
JPH0266681U
JPH0266681U JP14677988U JP14677988U JPH0266681U JP H0266681 U JPH0266681 U JP H0266681U JP 14677988 U JP14677988 U JP 14677988U JP 14677988 U JP14677988 U JP 14677988U JP H0266681 U JPH0266681 U JP H0266681U
Authority
JP
Japan
Prior art keywords
stock solution
source gas
epitaxial growth
remaining amount
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14677988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14677988U priority Critical patent/JPH0266681U/ja
Publication of JPH0266681U publication Critical patent/JPH0266681U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14677988U 1988-11-09 1988-11-09 Pending JPH0266681U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14677988U JPH0266681U (enrdf_load_html_response) 1988-11-09 1988-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14677988U JPH0266681U (enrdf_load_html_response) 1988-11-09 1988-11-09

Publications (1)

Publication Number Publication Date
JPH0266681U true JPH0266681U (enrdf_load_html_response) 1990-05-21

Family

ID=31416585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14677988U Pending JPH0266681U (enrdf_load_html_response) 1988-11-09 1988-11-09

Country Status (1)

Country Link
JP (1) JPH0266681U (enrdf_load_html_response)

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