JPH0266276U - - Google Patents

Info

Publication number

JPH0266276U

JPH0266276U JP14516388U JP14516388U JPH0266276U JP H0266276 U JPH0266276 U JP H0266276U JP 14516388 U JP14516388 U JP 14516388U JP 14516388 U JP14516388 U JP 14516388U JP H0266276 U JPH0266276 U JP H0266276U

Authority

JP

Japan

Prior art keywords

piezoelectric vibrator

protective layer

polyimide resin

view

electrode

Prior art date

1988-11-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011241 protective layer Substances 0.000 claims description 3
• 229920001721 polyimide Polymers 0.000 claims description 2
• 239000009719 polyimide resin Substances 0.000 claims description 2
• 239000011521 glass Substances 0.000 description 3
• 239000010410 layer Substances 0.000 description 3
• 230000003746 surface roughness Effects 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 239000004332 silver Substances 0.000 description 1

Cited By (2)