JPH0265938U - - Google Patents

Info

Publication number
JPH0265938U
JPH0265938U JP14630688U JP14630688U JPH0265938U JP H0265938 U JPH0265938 U JP H0265938U JP 14630688 U JP14630688 U JP 14630688U JP 14630688 U JP14630688 U JP 14630688U JP H0265938 U JPH0265938 U JP H0265938U
Authority
JP
Japan
Prior art keywords
piezoelectric
diaphragm
piezoelectric diaphragm
pump
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14630688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14630688U priority Critical patent/JPH0265938U/ja
Publication of JPH0265938U publication Critical patent/JPH0265938U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP14630688U 1988-11-09 1988-11-09 Pending JPH0265938U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14630688U JPH0265938U (enrdf_load_stackoverflow) 1988-11-09 1988-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14630688U JPH0265938U (enrdf_load_stackoverflow) 1988-11-09 1988-11-09

Publications (1)

Publication Number Publication Date
JPH0265938U true JPH0265938U (enrdf_load_stackoverflow) 1990-05-17

Family

ID=31415669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14630688U Pending JPH0265938U (enrdf_load_stackoverflow) 1988-11-09 1988-11-09

Country Status (1)

Country Link
JP (1) JPH0265938U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
US4983876A (en) Piezoelectric pump assembly
JPH0265938U (enrdf_load_stackoverflow)
JPH06117377A (ja) 定量ポンプ
JPH03112587U (enrdf_load_stackoverflow)
JP2632308B2 (ja) ピエゾポンプ
JPS6158482A (ja) 圧電振動子の変位量制御方法
JPS63123780U (enrdf_load_stackoverflow)
JPH027569U (enrdf_load_stackoverflow)
JPH01280694A (ja) 圧電振動子ポンプ装置
JPS61146832U (enrdf_load_stackoverflow)
JPS61101137U (enrdf_load_stackoverflow)
JPS6459075A (en) Semiconductor acceleration sensor
JPH01134785U (enrdf_load_stackoverflow)
JPH01136430U (enrdf_load_stackoverflow)
JPH0475256U (enrdf_load_stackoverflow)
JPH0269745U (enrdf_load_stackoverflow)
JPH0269079U (enrdf_load_stackoverflow)
JPH0296487U (enrdf_load_stackoverflow)
JPH0432019U (enrdf_load_stackoverflow)
JPS629701U (enrdf_load_stackoverflow)
JPH02137582U (enrdf_load_stackoverflow)
JPH01127268U (enrdf_load_stackoverflow)
JPH0250538U (enrdf_load_stackoverflow)
JPS61166816U (enrdf_load_stackoverflow)
JPH0221895U (enrdf_load_stackoverflow)