JPH0265101U - - Google Patents

Info

Publication number
JPH0265101U
JPH0265101U JP14409288U JP14409288U JPH0265101U JP H0265101 U JPH0265101 U JP H0265101U JP 14409288 U JP14409288 U JP 14409288U JP 14409288 U JP14409288 U JP 14409288U JP H0265101 U JPH0265101 U JP H0265101U
Authority
JP
Japan
Prior art keywords
piezoelectric actuator
micrometer head
actuator
block
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14409288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14409288U priority Critical patent/JPH0265101U/ja
Publication of JPH0265101U publication Critical patent/JPH0265101U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Instruments Using Mechanical Means (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例を示す側面図、第2
図a,bは第1図に示す微動機構付マイクロメー
タの一使用例を示す平面図及び側面図、第3図は
従来の一例を示す側面図である。 1……マイクロメータヘツド、2……積層型圧
電アクチユエータ、3……スピンドル、4……つ
まみ、5……第一のブロツク、6……第二のブロ
ツク、7……電源、8……可動体。

Claims (1)

    【実用新案登録請求の範囲】
  1. スピンドル直進型マイクロメータヘツドと、積
    層型圧電アクチユエータと、前記圧電アクチユエ
    ータと前記マイクロメータヘツドとを同軸に固定
    する第一のブロツクと、前記圧電アクチユエータ
    端面に固定された第二のブロツクと、前記圧電ア
    クチユエータを駆動させる電源を含むことを特徴
    とする微動機構付マイクロメータヘツド。
JP14409288U 1988-11-02 1988-11-02 Pending JPH0265101U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14409288U JPH0265101U (ja) 1988-11-02 1988-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14409288U JPH0265101U (ja) 1988-11-02 1988-11-02

Publications (1)

Publication Number Publication Date
JPH0265101U true JPH0265101U (ja) 1990-05-16

Family

ID=31411490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14409288U Pending JPH0265101U (ja) 1988-11-02 1988-11-02

Country Status (1)

Country Link
JP (1) JPH0265101U (ja)

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