JPH0264793U - - Google Patents

Info

Publication number
JPH0264793U
JPH0264793U JP14466888U JP14466888U JPH0264793U JP H0264793 U JPH0264793 U JP H0264793U JP 14466888 U JP14466888 U JP 14466888U JP 14466888 U JP14466888 U JP 14466888U JP H0264793 U JPH0264793 U JP H0264793U
Authority
JP
Japan
Prior art keywords
vacuum pump
flow path
groove
gas flow
stationary member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14466888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14466888U priority Critical patent/JPH0264793U/ja
Publication of JPH0264793U publication Critical patent/JPH0264793U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP14466888U 1988-11-04 1988-11-04 Pending JPH0264793U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14466888U JPH0264793U (US06373033-20020416-M00071.png) 1988-11-04 1988-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14466888U JPH0264793U (US06373033-20020416-M00071.png) 1988-11-04 1988-11-04

Publications (1)

Publication Number Publication Date
JPH0264793U true JPH0264793U (US06373033-20020416-M00071.png) 1990-05-15

Family

ID=31412575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14466888U Pending JPH0264793U (US06373033-20020416-M00071.png) 1988-11-04 1988-11-04

Country Status (1)

Country Link
JP (1) JPH0264793U (US06373033-20020416-M00071.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015102076A (ja) * 2013-11-28 2015-06-04 エドワーズ株式会社 真空ポンプ用部品、シーグバーン型排気機構、および複合型真空ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015102076A (ja) * 2013-11-28 2015-06-04 エドワーズ株式会社 真空ポンプ用部品、シーグバーン型排気機構、および複合型真空ポンプ
KR20160090289A (ko) * 2013-11-28 2016-07-29 에드워즈 가부시키가이샤 진공 펌프용 부품, 시그반형 배기 기구, 및 복합형 진공 펌프

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