JPH0262720U - - Google Patents
Info
- Publication number
- JPH0262720U JPH0262720U JP14152888U JP14152888U JPH0262720U JP H0262720 U JPH0262720 U JP H0262720U JP 14152888 U JP14152888 U JP 14152888U JP 14152888 U JP14152888 U JP 14152888U JP H0262720 U JPH0262720 U JP H0262720U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- single crystal
- semiconductor film
- crystal semiconductor
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000012535 impurity Substances 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 2
- 230000001590 oxidative effect Effects 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152888U JPH0262720U (cs) | 1988-10-29 | 1988-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152888U JPH0262720U (cs) | 1988-10-29 | 1988-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0262720U true JPH0262720U (cs) | 1990-05-10 |
Family
ID=31406670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152888U Pending JPH0262720U (cs) | 1988-10-29 | 1988-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0262720U (cs) |
-
1988
- 1988-10-29 JP JP14152888U patent/JPH0262720U/ja active Pending