JPH026236B2 - - Google Patents
Info
- Publication number
- JPH026236B2 JPH026236B2 JP15087281A JP15087281A JPH026236B2 JP H026236 B2 JPH026236 B2 JP H026236B2 JP 15087281 A JP15087281 A JP 15087281A JP 15087281 A JP15087281 A JP 15087281A JP H026236 B2 JPH026236 B2 JP H026236B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- laser
- oscillation
- oscillator
- acousto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010355 oscillation Effects 0.000 claims description 15
- 230000000087 stabilizing effect Effects 0.000 claims description 10
- 238000000411 transmission spectrum Methods 0.000 claims description 10
- 238000000862 absorption spectrum Methods 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 claims description 4
- 238000013459 approach Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、レーザの発振周波数を周波数基準と
なる吸収または透過スペクトルの中央部に一致さ
せることにより、周波数の安定化を図る装置に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for stabilizing the frequency by matching the oscillation frequency of a laser to the center of an absorption or transmission spectrum serving as a frequency reference.
ヘテロダインおよびホモダイン方式の光通信の
光源として、もしくは光干渉測長装置のような光
の干渉を利用した計測装置の光源として、それぞ
れレーザを使用する場合、その発振周波数が安定
化していることが要求される。 When using a laser as a light source for heterodyne and homodyne optical communications, or as a light source for measurement devices that utilize light interference, such as optical interferometric length measurement devices, it is required that the oscillation frequency be stabilized. be done.
この種レーザの発振周波数の安定化方法として
は、一般的に、分子の吸収スペクトルあるいはフ
アブリー・ペロー干渉計の透過スペクトルの一つ
を基準とし、このスペクトルの中心周波数とレー
ザ発振周波数との差(以下誤差信号という)を検
出し、誤差信号が零となるようレーザ発振周波数
を制御することが知られている。そこで、従来こ
の種のレーザ周波数安定化装置においては、誤差
信号を検出するために、レーザ光を機械的に振動
させた鏡に反射させてドツプラ効果により周波数
変調させる手段またはフアブリー・ペロー干渉計
の一方の鏡を機械的に振動させてその透過スペク
トルを揺動させる手段が採用されている。しかし
ながら、これらの手段は、機械的な振動部を有す
るため、耐久性や堅牢性に難点があり、さらに振
動周波数が数10kHzに制限されるため、周波数安
定化制御装置の応答速度が遅くなる欠点がある。 The method for stabilizing the oscillation frequency of this type of laser is generally to use either the absorption spectrum of the molecule or the transmission spectrum of a Fabry-Perot interferometer as a reference, and to calculate the difference between the center frequency of this spectrum and the laser oscillation frequency ( It is known to detect an error signal (hereinafter referred to as an error signal) and control the laser oscillation frequency so that the error signal becomes zero. Conventionally, in this type of laser frequency stabilization device, in order to detect the error signal, the laser beam is reflected on a mechanically vibrated mirror and the frequency is modulated by the Doppler effect, or a Fabry-Perot interferometer is used. A method of mechanically vibrating one mirror to fluctuate its transmission spectrum is employed. However, these methods have problems with durability and robustness because they have a mechanical vibrating part, and furthermore, because the vibration frequency is limited to several tens of kHz, the response speed of the frequency stabilization control device is slow. There is.
本発明は、前述した従来のレーザ発振周波数の
安定化装置の問題点を全て除去すべく提案された
ものであつて、その目的とするところは、レーザ
光の周波数変調に音響光学的周波数変調器を使用
すると共にこの変調信号を参照信号として誤差信
号の検出を行い、検出された誤差信号に基づいて
レーザ発振器の発振周波数を制御することによ
り、レーザ発振周波数の安定化を行うことにあ
る。 The present invention was proposed in order to eliminate all the problems of the conventional laser oscillation frequency stabilizing device described above, and its purpose is to use an acousto-optic frequency modulator for frequency modulation of laser light. The objective is to stabilize the laser oscillation frequency by using the modulation signal, detecting an error signal using this modulation signal as a reference signal, and controlling the oscillation frequency of the laser oscillator based on the detected error signal.
次に、本発明に係るレーザの周波数安定化装置
の実施例につき、添付図面を参照して以下詳細に
説明する。 Next, embodiments of the laser frequency stabilizing device according to the present invention will be described in detail below with reference to the accompanying drawings.
第1図は、本発明装置の基本構成を示すブロツ
ク回路図である。すなわち、第1図において、1
はレーザ発振器、2はビームスプリツタ、3は音
響光学的周波数変調器、4は周波数基準となる吸
収または透過スペクトルを有する装置、5は光電
変換素子、6は参照信号発生器、7は電圧制御発
振器、8は位相検波器、そして9は積分器をそれ
ぞれ示す。 FIG. 1 is a block circuit diagram showing the basic configuration of the device of the present invention. That is, in Figure 1, 1
is a laser oscillator, 2 is a beam splitter, 3 is an acousto-optic frequency modulator, 4 is a device having an absorption or transmission spectrum as a frequency reference, 5 is a photoelectric conversion element, 6 is a reference signal generator, and 7 is a voltage control 8 represents an oscillator, 8 represents a phase detector, and 9 represents an integrator.
次に、第1図に示す回路の動作につき説明す
る。 Next, the operation of the circuit shown in FIG. 1 will be explained.
まず、レーザ発振器1から出射したレーザ光1
0の一部は、ビームスプリツタ2により反射され
て音響光学的周波数変調器3に入射する。この音
響光学的周波数変調器3は、参照信号発生器6に
より発生された参照信号により制御される電圧制
御発振器7の出力信号の周波数と等しい周波数偏
移を入射光11に与えて出射光を得る。そこで、
今、参照信号発振器6により発生された参照信号
の周波数をrとし、この信号により制御される電
圧制御発振器7の中心周波数をvとすれば、電
圧制御発振器7の出力信号は中心周波数がvで
変調周波数がrの周波数変調波となる。従つて、
音響光学的周波数変調器3の入射光の周波数を
oとすれば、音響光学的周波数変調器3の出射
光は、中心周波数o±v、変調周波数rの周波
数変調光となる。なお、この場合、中心周波数の
偏移の正負は、音響光学的周波数変調器3の構成
によつて決定される。 First, the laser beam 1 emitted from the laser oscillator 1
0 is reflected by the beam splitter 2 and enters the acousto-optic frequency modulator 3. This acousto-optic frequency modulator 3 gives the incident light 11 a frequency shift equal to the frequency of the output signal of the voltage controlled oscillator 7 controlled by the reference signal generated by the reference signal generator 6 to obtain output light. . Therefore,
Now, if the frequency of the reference signal generated by the reference signal oscillator 6 is r, and the center frequency of the voltage controlled oscillator 7 controlled by this signal is v, then the output signal of the voltage controlled oscillator 7 has a center frequency of v. The modulation frequency becomes a frequency modulated wave of r. Therefore,
The frequency of the incident light of the acousto-optic frequency modulator 3 is
If o, the output light from the acousto-optic frequency modulator 3 becomes frequency modulated light with a center frequency o±v and a modulation frequency r. Note that in this case, the sign or minus of the deviation of the center frequency is determined by the configuration of the acousto-optic frequency modulator 3.
次いで、このようにして得られた音響光学的周
波数変調器3の出射光は、周波数基準となる吸収
または透過スペクトルを有する装置4に入力さ
れ、得られた透過光は光電変換素子5により電気
信号に変換される。このようにして得られた電気
信号は、位相検波器8により、前述した参照信号
発生器6で発生された周波数rの参照信号を参照
して位相検波される。そこで、今、前述した周波
数基準となる吸収または透過スペクトルを有する
装置4が、第2図に示すような中心周波数sから
なる吸収または透過スペクトルを有するものと
し、しかも参照信号の周波数rの成分を充分除去
できる時定数を有する積分器9を設けるものとす
る。この場合、積分器9の出力信号は、第3図に
示すように、音響光学的周波数変調器3の出射光
の中心周波数o±vが前記装置4の中心周波数
sに一致したとき零となり、その前後で逆符号と
なる。従つて、前記積分器9の出力信号により、
レーザ発振器1の周波数oを制御すれば、音響
光学的周波数変調器3の出射光の周波数o±v
を周波数基準となる装置4の吸収または透過スペ
クトルの中心周波数sに常に一致させることがで
きる。すなわち、これは、レーザ発振器1の発振
周波数oが、安定な周波数s±vに一致するよ
う安定化されていることを意味する。 Next, the output light of the acousto-optic frequency modulator 3 obtained in this way is input to a device 4 having an absorption or transmission spectrum serving as a frequency reference, and the obtained transmitted light is converted into an electric signal by a photoelectric conversion element 5. is converted to The electrical signal thus obtained is subjected to phase detection by the phase detector 8 with reference to the reference signal of frequency r generated by the reference signal generator 6 described above. Therefore, let us now assume that the device 4, which has an absorption or transmission spectrum that serves as a frequency reference, has an absorption or transmission spectrum that has a center frequency s as shown in FIG. It is assumed that an integrator 9 is provided which has a time constant that can sufficiently eliminate the noise. In this case, the output signal of the integrator 9 has a center frequency o±v of the output light of the acousto-optic frequency modulator 3, as shown in FIG.
When it matches s, it becomes zero, and before and after that, the sign becomes opposite. Therefore, by the output signal of the integrator 9,
By controlling the frequency o of the laser oscillator 1, the frequency o±v of the emitted light from the acousto-optic frequency modulator 3 can be adjusted.
can always be made to coincide with the center frequency s of the absorption or transmission spectrum of the device 4 serving as a frequency reference. That is, this means that the oscillation frequency o of the laser oscillator 1 is stabilized to match the stable frequency s±v.
前述したレーザの周波数安定化装置において、
参照信号の周波数rを高める程、その周波数成分
を除去するのに必要な積分器9の時定数を小さく
することができ、この結果、この種装置の応答速
度を速くすることができる。しかも、音響光学的
周波数変調器3を使用することにより、前記参照
信号の周波数rを数MHzまで上げることが容易で
あり、この種装置の性能の向上と共に信頼性の向
上を図ることができる。 In the laser frequency stabilization device mentioned above,
The higher the frequency r of the reference signal, the smaller the time constant of the integrator 9 required to remove that frequency component, and as a result, the response speed of this type of device can be increased. Furthermore, by using the acousto-optic frequency modulator 3, it is easy to increase the frequency r of the reference signal to several MHz, and it is possible to improve the performance and reliability of this type of device.
前述した実施例から明らかなように、本発明に
よれば、従来装置のように機械的振動部を設ける
ことなく、レーザの周波数安定化を容易に達成す
ることができる。従つて、本発明装置は、従来装
置と比べて耐久性、堅牢性および応答速度の点に
おいてそれぞれ優れた特徴を有する。 As is clear from the embodiments described above, according to the present invention, frequency stabilization of the laser can be easily achieved without providing a mechanical vibrating section unlike conventional devices. Therefore, the device of the present invention has superior characteristics in terms of durability, robustness, and response speed compared to conventional devices.
第1図は本発明に係るレーザの周波数安定化装
置の一実施例を示すブロツク回路図、第2図は第
1図に示す周波数基準となる装置の吸収または透
過スペクトルの周波数特性曲線図、第3図は第1
図に示す積分器の出力信号の周波数特性曲線図で
ある。
1…レーザ発振器、2…ビームスプリツタ、3
…音響光学的周波数変調器、4…周波数基準とな
る装置、5…光電変換素子、6…参照信号発生
器、7…電圧制御発振器、8…位相検波器、9…
積分器。
FIG. 1 is a block circuit diagram showing an embodiment of a laser frequency stabilizing device according to the present invention, FIG. 2 is a frequency characteristic curve diagram of absorption or transmission spectrum of the device serving as a frequency reference shown in FIG. Figure 3 is the first
FIG. 3 is a frequency characteristic curve diagram of the output signal of the integrator shown in the figure. 1... Laser oscillator, 2... Beam splitter, 3
... Acousto-optic frequency modulator, 4... Frequency reference device, 5... Photoelectric conversion element, 6... Reference signal generator, 7... Voltage controlled oscillator, 8... Phase detector, 9...
Integrator.
Claims (1)
響光学的周波数変調器と、周波数基準となる吸収
または透過スペクトルを有する装置と、この周波
数基準となるスペクトルの中心周波数とレーザ発
振周波数との差を検出してこの差が零に近づくよ
うにレーザ発振器の発振周波数を制御する手段と
からなり、前記音響光学的周波数変調器によりレ
ーザ光の一部に周波数変調を加え、レーザ発振周
波数と周波数基準となるスペクトルの中心周波数
との差を検出するよう構成することを特徴とする
レーザの周波数安定化装置。 2 特許請求の範囲第1項記載の周波数安定化装
置において、音響光学的周波数変調器は、参照信
号発生器から発生する所定周波数の参照信号によ
り制御されて所定の中心周波数からなる周波数変
調信号を発生する電圧制御発振器により、前記発
振器の出力信号の周波数と等しい周波数偏移を入
射光に与えるよう構成してなるレーザの周波数安
定化装置。 3 特許請求の範囲第1項記載の周波数安定化装
置において、周波数基準となるスペクトルの中心
周波数とレーザ発振周波数との差を検出してレー
ザ発振器の発振周波数を制御する手段は、周波数
基準となる装置からの出射光を電気信号に変換す
る光電変換素子と、前記電気信号を参照信号発生
器で発生される所定の周波数からなる参照信号を
参照して位相検波する位相検波器と、前記参照信
号の所定周波数成分を充分除去できる時定数を有
する積分器とから構成してなるレーザの周波数安
定化装置。[Claims] 1. A laser oscillator whose oscillation frequency can be controlled, an acousto-optic frequency modulator, a device having an absorption or transmission spectrum serving as a frequency reference, and a center frequency of the spectrum serving as a frequency reference and laser oscillation. and a means for controlling the oscillation frequency of the laser oscillator so that the difference approaches zero by detecting the difference between the two frequencies, and means for applying frequency modulation to a part of the laser beam by the acousto-optic frequency modulator, thereby causing the laser oscillation. A laser frequency stabilizing device characterized by being configured to detect a difference between a frequency and a center frequency of a spectrum serving as a frequency reference. 2. In the frequency stabilizing device according to claim 1, the acousto-optic frequency modulator generates a frequency modulation signal having a predetermined center frequency by being controlled by a reference signal of a predetermined frequency generated from a reference signal generator. A frequency stabilizing device for a laser, which is configured to give incident light a frequency shift equal to the frequency of an output signal of the oscillator by a generated voltage controlled oscillator. 3. In the frequency stabilizing device according to claim 1, the means for controlling the oscillation frequency of the laser oscillator by detecting the difference between the center frequency of the spectrum serving as the frequency reference and the laser oscillation frequency serves as the frequency reference. A photoelectric conversion element that converts light emitted from the device into an electrical signal, a phase detector that detects the phase of the electrical signal by referring to a reference signal having a predetermined frequency generated by a reference signal generator, and the reference signal. A laser frequency stabilizing device comprising an integrator having a time constant that can sufficiently remove a predetermined frequency component.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15087281A JPS5852891A (en) | 1981-09-24 | 1981-09-24 | Stabilizer for frequency of laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15087281A JPS5852891A (en) | 1981-09-24 | 1981-09-24 | Stabilizer for frequency of laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5852891A JPS5852891A (en) | 1983-03-29 |
JPH026236B2 true JPH026236B2 (en) | 1990-02-08 |
Family
ID=15506216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15087281A Granted JPS5852891A (en) | 1981-09-24 | 1981-09-24 | Stabilizer for frequency of laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5852891A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1219165B (en) * | 1988-03-31 | 1990-05-03 | Cselt Centro Studi Lab Telecom | PROCEDURE AND DEVICE FOR AUTOMATIC LASER FREQUENCY CONTROL OF SEMICONDUCTOR |
JP2737181B2 (en) * | 1988-11-30 | 1998-04-08 | 株式会社ニコン | Excimer laser generator |
IT1246813B (en) * | 1990-06-07 | 1994-11-28 | Ima Spa | DEVICE FOR THE TRANSFORMATION OF A TUBULAR DIE CUT INTO A CORRESPONDENT CARTON. |
JP7304061B2 (en) * | 2019-05-31 | 2023-07-06 | 国立研究開発法人産業技術総合研究所 | Optical frequency/phase automatic stabilizer |
-
1981
- 1981-09-24 JP JP15087281A patent/JPS5852891A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5852891A (en) | 1983-03-29 |
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