JPH0261958U - - Google Patents

Info

Publication number
JPH0261958U
JPH0261958U JP14030488U JP14030488U JPH0261958U JP H0261958 U JPH0261958 U JP H0261958U JP 14030488 U JP14030488 U JP 14030488U JP 14030488 U JP14030488 U JP 14030488U JP H0261958 U JPH0261958 U JP H0261958U
Authority
JP
Japan
Prior art keywords
substrate
transfer device
vapor phase
phase growth
substrate transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14030488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0613257Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14030488U priority Critical patent/JPH0613257Y2/ja
Publication of JPH0261958U publication Critical patent/JPH0261958U/ja
Application granted granted Critical
Publication of JPH0613257Y2 publication Critical patent/JPH0613257Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14030488U 1988-10-27 1988-10-27 横型気相成長装置 Expired - Lifetime JPH0613257Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14030488U JPH0613257Y2 (ja) 1988-10-27 1988-10-27 横型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14030488U JPH0613257Y2 (ja) 1988-10-27 1988-10-27 横型気相成長装置

Publications (2)

Publication Number Publication Date
JPH0261958U true JPH0261958U (US20100056889A1-20100304-C00004.png) 1990-05-09
JPH0613257Y2 JPH0613257Y2 (ja) 1994-04-06

Family

ID=31404348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14030488U Expired - Lifetime JPH0613257Y2 (ja) 1988-10-27 1988-10-27 横型気相成長装置

Country Status (1)

Country Link
JP (1) JPH0613257Y2 (US20100056889A1-20100304-C00004.png)

Also Published As

Publication number Publication date
JPH0613257Y2 (ja) 1994-04-06

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