JPH0261957U - - Google Patents
Info
- Publication number
- JPH0261957U JPH0261957U JP14224388U JP14224388U JPH0261957U JP H0261957 U JPH0261957 U JP H0261957U JP 14224388 U JP14224388 U JP 14224388U JP 14224388 U JP14224388 U JP 14224388U JP H0261957 U JPH0261957 U JP H0261957U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- film thickness
- evaporation sources
- shutters
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14224388U JPH0261957U (de) | 1988-10-31 | 1988-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14224388U JPH0261957U (de) | 1988-10-31 | 1988-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261957U true JPH0261957U (de) | 1990-05-09 |
Family
ID=31408027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14224388U Pending JPH0261957U (de) | 1988-10-31 | 1988-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261957U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011122187A (ja) * | 2009-12-08 | 2011-06-23 | Ulvac Japan Ltd | 材料蒸発システム及びその成膜装置 |
-
1988
- 1988-10-31 JP JP14224388U patent/JPH0261957U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011122187A (ja) * | 2009-12-08 | 2011-06-23 | Ulvac Japan Ltd | 材料蒸発システム及びその成膜装置 |