JPH0261053U - - Google Patents

Info

Publication number
JPH0261053U
JPH0261053U JP14046288U JP14046288U JPH0261053U JP H0261053 U JPH0261053 U JP H0261053U JP 14046288 U JP14046288 U JP 14046288U JP 14046288 U JP14046288 U JP 14046288U JP H0261053 U JPH0261053 U JP H0261053U
Authority
JP
Japan
Prior art keywords
electrode plate
electrode
magnet insertion
grooves
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14046288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614398Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14046288U priority Critical patent/JPH0614398Y2/ja
Publication of JPH0261053U publication Critical patent/JPH0261053U/ja
Application granted granted Critical
Publication of JPH0614398Y2 publication Critical patent/JPH0614398Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14046288U 1988-10-27 1988-10-27 イオン源用電極 Expired - Lifetime JPH0614398Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14046288U JPH0614398Y2 (ja) 1988-10-27 1988-10-27 イオン源用電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14046288U JPH0614398Y2 (ja) 1988-10-27 1988-10-27 イオン源用電極

Publications (2)

Publication Number Publication Date
JPH0261053U true JPH0261053U (US08080257-20111220-C00005.png) 1990-05-07
JPH0614398Y2 JPH0614398Y2 (ja) 1994-04-13

Family

ID=31404656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14046288U Expired - Lifetime JPH0614398Y2 (ja) 1988-10-27 1988-10-27 イオン源用電極

Country Status (1)

Country Link
JP (1) JPH0614398Y2 (US08080257-20111220-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016207480A (ja) * 2015-04-23 2016-12-08 日新電機株式会社 荷電粒子源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016207480A (ja) * 2015-04-23 2016-12-08 日新電機株式会社 荷電粒子源

Also Published As

Publication number Publication date
JPH0614398Y2 (ja) 1994-04-13

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