JPH0260839U - - Google Patents

Info

Publication number
JPH0260839U
JPH0260839U JP14016888U JP14016888U JPH0260839U JP H0260839 U JPH0260839 U JP H0260839U JP 14016888 U JP14016888 U JP 14016888U JP 14016888 U JP14016888 U JP 14016888U JP H0260839 U JPH0260839 U JP H0260839U
Authority
JP
Japan
Prior art keywords
vacuum pump
gas
electromagnetic valve
filling device
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14016888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14016888U priority Critical patent/JPH0260839U/ja
Publication of JPH0260839U publication Critical patent/JPH0260839U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP14016888U 1988-10-27 1988-10-27 Pending JPH0260839U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14016888U JPH0260839U (US20030204162A1-20031030-M00001.png) 1988-10-27 1988-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14016888U JPH0260839U (US20030204162A1-20031030-M00001.png) 1988-10-27 1988-10-27

Publications (1)

Publication Number Publication Date
JPH0260839U true JPH0260839U (US20030204162A1-20031030-M00001.png) 1990-05-07

Family

ID=31404096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14016888U Pending JPH0260839U (US20030204162A1-20031030-M00001.png) 1988-10-27 1988-10-27

Country Status (1)

Country Link
JP (1) JPH0260839U (US20030204162A1-20031030-M00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173049A (ja) * 1984-09-18 1986-04-15 Nippon Denso Co Ltd 漏れ検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173049A (ja) * 1984-09-18 1986-04-15 Nippon Denso Co Ltd 漏れ検査装置

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