JPH0260044A - Metallic vapor discharge lamp - Google Patents
Metallic vapor discharge lampInfo
- Publication number
- JPH0260044A JPH0260044A JP20813188A JP20813188A JPH0260044A JP H0260044 A JPH0260044 A JP H0260044A JP 20813188 A JP20813188 A JP 20813188A JP 20813188 A JP20813188 A JP 20813188A JP H0260044 A JPH0260044 A JP H0260044A
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- vapor discharge
- iodine
- halogen
- discharge lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 229910052740 iodine Inorganic materials 0.000 claims abstract description 18
- 229910052794 bromium Inorganic materials 0.000 claims abstract description 12
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 8
- 229910052718 tin Inorganic materials 0.000 claims abstract description 8
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 16
- 239000011630 iodine Substances 0.000 claims description 16
- 239000011777 magnesium Substances 0.000 claims description 13
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 11
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 11
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 10
- 229910052753 mercury Inorganic materials 0.000 claims description 10
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 9
- 229910052749 magnesium Inorganic materials 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 6
- 238000007789 sealing Methods 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 description 23
- 150000002367 halogens Chemical class 0.000 description 23
- 238000012423 maintenance Methods 0.000 description 13
- 239000000203 mixture Substances 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 5
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- BLQJIBCZHWBKSL-UHFFFAOYSA-L magnesium iodide Chemical compound [Mg+2].[I-].[I-] BLQJIBCZHWBKSL-UHFFFAOYSA-L 0.000 description 2
- 229910001641 magnesium iodide Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical group I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- -1 that is Chemical compound 0.000 description 1
- KOECRLKKXSXCPB-UHFFFAOYSA-K triiodobismuthane Chemical compound I[Bi](I)I KOECRLKKXSXCPB-UHFFFAOYSA-K 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、紫外線光源として使用される金属蒸気放電灯
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a metal vapor discharge lamp used as an ultraviolet light source.
紫外線を照射する光源ランプとして高圧水銀灯が使用さ
れることが多いが、この高圧水銀灯の発光は、多数の輝
線スペクトルからなっており、各スペクトルは相当の広
い波長域にわたって分散している。従って、用途によっ
てはその有効波長域以外の波長の光を放射するが、この
ため、有効波長域の出力が少なかったり、有効波長域以
外の波長の光がその用途にとって有害であり、少ない方
が好ましいことがある０例えば、半導体の製造において
レジストの耐熱性向上のために紫外線を照射して硬化さ
せる工程では、最も有効な波長域は。High-pressure mercury lamps are often used as light source lamps for irradiating ultraviolet rays, but the light emitted from these high-pressure mercury lamps consists of a large number of bright line spectra, and each spectrum is dispersed over a fairly wide wavelength range. Therefore, depending on the application, light with a wavelength outside the effective wavelength range is emitted, and for this reason, the output in the effective wavelength range may be low, or the light with a wavelength outside the effective wavelength range is harmful to the application, so less is better. For example, in the process of curing resist by irradiating it with ultraviolet rays in order to improve the heat resistance of resist in semiconductor manufacturing, the most effective wavelength range is:
約２２０〜３３０ｎｍの範囲であり、 ３３０〜４５０
ｎｍの出力が強いと、レジストの種類によっては発泡現
象を起すので好ましくないとされている。そこで最近で
は、発光管内に水銀の他に金属ハロゲン化物を発光物質
として封入し、特定波長の光の発光量を増加させた金属
蒸気放電灯が多用されているが、例えば沃素とマグネシ
ウムおよび希ガスを封入して沃化マグネシウムを発光物
質とした金属蒸気放電灯は、波長が約２２０〜３３０ｎ
ｍの範囲の出力が十分ではなく、前述のレジストの硬化
工程の光源ランプとして必ずしも満足できるものではな
い、このため最近では、ハロゲンと希ガスおよび水銀と
マグネシウム以外にも、助成分として錫およびビスマス
の少なくとも一種以上を封入し、波長が約２２０〜３３
０ｎｍの範囲の出力を大きくした金属蒸気放電灯が開発
されている。The range is approximately 220-330 nm, 330-450
A strong nm output is considered undesirable because it may cause bubbling depending on the type of resist. Recently, metal vapor discharge lamps have been widely used in which metal halides in addition to mercury are sealed as luminescent substances in the arc tube to increase the amount of light emitted at specific wavelengths. A metal vapor discharge lamp that uses magnesium iodide as a luminescent material has a wavelength of about 220 to 330 nm.
The output in the m range is not sufficient and is not necessarily satisfactory as a light source lamp for the resist curing process mentioned above.For this reason, recently, in addition to halogens, rare gases, mercury and magnesium, tin and bismuth are used as supplements. at least one type of wavelength of about 220 to 33
Metal vapor discharge lamps with increased output in the 0 nm range have been developed.
ところで、かかる金属蒸気放電灯において、ランプ寿命
が長くて、再点弧時の安定性が良いことが要求されるが
、封入される金ＪＡＦ１やハロゲン量が適切でないと、
ランプ寿命が著しく短くなり、また再点弧時の安定性が
悪く、ランプの立消不良が生じる不具合がある。By the way, such metal vapor discharge lamps are required to have a long lamp life and good stability during re-ignition, but if the amount of gold JAF1 and halogen enclosed is not appropriate,
There are problems in that the lamp life is significantly shortened, stability is poor upon re-ignition, and the lamp fails to turn off.
そこで本発明は、ランプ寿命が長くて、再点弧時の安定
性が良く、波長が約２２０〜３３０ｒ＋＋ｓの範囲の出
力の大きな金属蒸気放電灯を堤供することを目的とする
。SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a metal vapor discharge lamp that has a long lamp life, good stability during restriking, and has a high output power in the wavelength range of about 220 to 330 r++s.
本発明の構成は、発光管の内部に水銀、マグネシウム、
ハロゲンおよび希ガス、更には錫およびビスマスの少な
くとも一種以上が封入され、ハロゲンが沃素もしくは沃
素と臭素の混合物である金属蒸気放電灯であって、
ハロゲンが沃素の場合は、
（Ｉの原子数）／ （Ｍ ｇ ＋ Ｓ ｎａｎｄｌｏｒ
Ｂ ｉの原子数）をＲＩＭとするとき、 ２ 、２
＜ ＲＩ Ｍ ＜ ３ 、６を満足することを特徴とし
、
ハロゲンが沃素と臭素の混合物の場合は、（Ｔ＋Ｂｒの
原子数）／ （Ｍ ｇ ＋ Ｓ ｎ ａｎｄｌｏｒ Ｂ
ｉの原子数）をＲＩＢＭ、（Ｂｒの原子数）／（Ｉ＋
Ｂｒの原子数）をＲＢＨとするとき、
２．２＜ＲＩＢＭ＜３．６およびＲＢＨ＜０．４を満足
することを特徴とする。The structure of the present invention is that mercury, magnesium,
In a metal vapor discharge lamp in which halogen and a rare gas, and at least one of tin and bismuth are enclosed, and the halogen is iodine or a mixture of iodine and bromine, and the halogen is iodine, (number of atoms of I) / (M g + S nandlor
When RIM is the number of atoms of B i, 2, 2
< RI M < 3, 6, and when the halogen is a mixture of iodine and bromine, (T + number of Br atoms) / (M g + S n andlor B
The number of atoms of i) is RIBM, (the number of atoms of Br)/(I+
It is characterized by satisfying the following conditions: 2.2<RIBM<3.6 and RBH<0.4, where RBH is the number of atoms of Br.
すなわち、マグネシウムに助成分として錫およびビスマ
スの少なくとも一種以上を封入して約２２０〜３３０ｎ
＋＊の範囲の出力を大きくした金属蒸気放電灯において
、ＲＩＭやＲＩＢＭおよびＲＢ Ｈに着目し、これらの
範囲を変化させて鋭意調査した結果９本願発明を完成し
たものであり、これらの範囲を前述の通りにすることに
より、ランプ寿命が長くなり、かつ立消えのない安定し
た点灯が可能であることを見出した。これは、かかる金
属蒸気放電灯において、ハロゲン量が少なくてＲＩＭや
ＲＩＢＭが２．２ よりも小さいと、マグネシウムと発
光管である石英ガラスの反応が点灯中に徐々に進行し、
マグネシウムの発光量が減少してしまうためにランプ寿
命が短くなると推定される。逆にハロゲン量を増加させ
ると１発光管内で安定な化合物が生成し、長時間点灯し
てもマグネシウムの発光量があまり減少しないが、ハロ
ゲン量を増加しすぎると、ハロゲンと電極が反応を始め
、電極が損耗して発光管内面に蒸着し、発光管が黒化し
て光量が減少してしまうため、ランプ寿命が短くなる。That is, about 220 to 330 N
In a metal vapor discharge lamp with increased output in the range of +*, we focused on RIM, RIBM, and RBH, and as a result of intensive investigation by changing these ranges, we completed the claimed invention9, and these ranges It has been found that by doing as described above, the lamp life can be extended and stable lighting without turning off is possible. This is because in such a metal vapor discharge lamp, if the amount of halogen is small and the RIM or RIBM is less than 2.2, the reaction between magnesium and the quartz glass that makes up the arc tube gradually progresses during lighting.
It is estimated that the lamp life will be shortened because the amount of light emitted by magnesium will decrease. Conversely, if the amount of halogen is increased, a stable compound will be generated within one arc tube, and the amount of light emitted by magnesium will not decrease much even if the light is turned on for a long time, but if the amount of halogen is increased too much, the halogen and the electrodes will start to react. , the electrodes wear out and deposit on the inner surface of the arc tube, turning the arc tube black and reducing the amount of light, which shortens the life of the lamp.
更には、例えばＲＩＢＭが３．６ を超えると、遊離ハ
ロゲン量が増加し、再点弧電圧が著しく上昇する。また
、ハロゲンが沃素と臭素の混合物の場合は、ＲＢ Ｈが
０．４ を超えると同様に再点弧電圧が著しく上昇する
。このため、点灯が不安定になり、ランプは立消え不良
を起す。結局のところ、ＲＩＭやＲＩＢＭおよびＲＢＨ
の範囲を前述の通りに規定することにより、ランプ寿命
を長くシ、かつ立消えのない安定した点灯が可能になる
。Furthermore, for example, when the RIBM exceeds 3.6, the amount of free halogen increases and the restriking voltage increases significantly. Further, when the halogen is a mixture of iodine and bromine, the restriking voltage similarly increases significantly when RB H exceeds 0.4. As a result, lighting becomes unstable and the lamp fails to turn off. After all, RIM, RIBM and RBH
By defining the range as described above, the lamp life can be extended and stable lighting without turning off can be achieved.
〔実施例〕
以下に図面に示す実施例に基いて本発明を具体的に説明
する。[Examples] The present invention will be specifically described below based on examples shown in the drawings.
第１図は、定格消費電力が４ＫＷの金属蒸気放電灯を示
すが、内径が２２ｍ＋ｍ、内容積が約１００ｃｃの発光
管１内に一対の電＋４２．２が２５０ｍｍの間隔で対向
配置されている。発光管１の両端がシール部１１であり
、シール部１１にモリブデン箔３が埋設され、このモリ
ブデン箔３を介して外導線４と電極２が電気的に接続さ
れている。Fig. 1 shows a metal vapor discharge lamp with a rated power consumption of 4KW, in which a pair of electric lamps are arranged facing each other at an interval of 250 mm in an arc tube 1 with an inner diameter of 22 m+m and an internal volume of about 100 cc. . Both ends of the arc tube 1 are sealed parts 11, and a molybdenum foil 3 is embedded in the sealed parts 11, and the outer conductor 4 and the electrode 2 are electrically connected through the molybdenum foil 3.
発光管１内には、１７０Ｂの水銀、１５トールのアルゴ
ンガスが封入され、マグネシウムが沃化マグネシウムと
して、また、錫とビスマスの１種以上が、沃化部あるい
は沃化ビスマスとして封入されており、波長が約２２０
〜３３０ｎｍの範囲の出力が非常に大きい金属蒸気放電
灯である。ここで、これらの金属の総量は、発光管内容
ＩＩｔｌｃｃ当り１゜ｏ ｘ ｉ ｏ−’〜１．０ＸＩ
Ｏ−＠モル程度である。そして、ハロゲンとして沃素が
封入されているが、沃素と水銀以外の全金属の原子量比
、つまりＲＩＭを変化させたランプを複数本用意し、実
際に点灯した。Inside the arc tube 1, 170B of mercury and 15 Torr of argon gas are sealed, and magnesium is sealed as magnesium iodide, and one or more of tin and bismuth is sealed as an iodide moiety or bismuth iodide. , the wavelength is about 220
It is a metal vapor discharge lamp with a very high output in the range of ~330 nm. Here, the total amount of these metals is 1° x i o-' to 1.0 x I per arc tube content IItlcc.
It is about O-@mole. Then, although iodine was sealed as a halogen, a plurality of lamps with varying atomic weight ratios of iodine and all metals other than mercury, that is, RIM, were prepared and actually lit.
第２図は、ハロゲンが沃素の場合の点灯当初の出力に対
する１０００時間点灯後の出力の比、つまり１０００時
間点灯後の波長２２０〜３３０ｎｍの紫外線の出力維持
率（％）を表示しものである。ところで、出力維持率が
７０％に低下すると使用に耐えず、ランプ寿命が終わっ
たと判断されるが、第２図から理解されるように、ＲＩ
Ｍが２程度では出力維持率が３０％程度であり、ランプ
寿命が極端に短いが、ＲＩＭがそれより増加すると出力
維持率は急速に上昇し、ＲＩＭが２．２以上になすると
出力維持率が７０％以上になる。すなわち、ランプ寿命
は１ｏｏｏ時間以上になり、十分長いランプ寿命を得る
ことができる。しかしながら、ＲＩＭが２．６以上から
斬減し、３．６ 以上になると出力維持率が７０％以下
になり、ランプ寿命はｔｏｏｏ時間以下になってしまう
。また、４．０以上になると、ランプ寿命が短かくなる
不具合以外にも、再点弧電圧が著しく上昇し１点灯が不
安定になってランプは立消え不良を起す。結局のところ
、ハロゲンが沃素の場合は、２．２＜ＲＩＭ＜３．６に
すれば。Figure 2 shows the ratio of the output after 1000 hours of lighting to the initial output when the halogen is iodine, that is, the output maintenance rate (%) of ultraviolet rays with a wavelength of 220 to 330 nm after 1000 hours of lighting. . By the way, when the output maintenance rate drops to 70%, it is judged that the lamp is no longer usable and the life of the lamp has ended.As can be understood from Figure 2, the RI
When M is about 2, the output maintenance rate is about 30%, and the lamp life is extremely short. However, when RIM increases beyond that, the output maintenance rate increases rapidly, and when RIM increases to 2.2 or more, the output maintenance rate decreases. becomes over 70%. That is, the lamp life is 100 hours or more, and a sufficiently long lamp life can be obtained. However, when RIM decreases from 2.6 or more and becomes 3.6 or more, the output maintenance rate becomes 70% or less, and the lamp life becomes too many hours or less. Further, if the value exceeds 4.0, not only the lamp life will be shortened, but also the restriking voltage will increase significantly, making lighting unstable and causing the lamp to fail to turn off. After all, if the halogen is iodine, 2.2<RIM<3.6.
ランプ寿命が長く、点灯も安定して立消え不良が発生す
ることもない。The lamp life is long, the lighting is stable, and no failure occurs.
次に、ハロゲンとして沃素と臭素の混合物をＲＢＨ＝０
．２５ の割合で封入したランプを点灯し。Next, use a mixture of iodine and bromine as the halogen with RBH=0
．． Light the lamp filled with a ratio of 25.
１０００時間点灯後の波長２２０〜３３０ｎｍの紫外線
の出力維持率（％）を？ｌ＋ｑ定した結果を第３図に示
す。これから理解できるように、この場合もハロゲンが
沃素の場合と同様に、ＲＩＢＭが２．２以上になると出
力維持率が７０％以上になるが、それ以降の出力維持率
は沃素単独の場合よりも大きく、ランプ寿命を更に長く
することができる。これは、臭素の添加によってハロゲ
ン化物がより安定化するためと推測される。そして、Ｒ
ＩＢＭが３．６以上になると、出力維持率が７０％以上
であるももの、再点弧電圧が著しく上昇し１点灯が不安
定になってランプは立消え不良を起してしまう。また、
ハロゲンとして沃素と臭素の混合物を封入する場合は、
ＲＢ Ｈの値も重要であり、ＲＢＨの値が大きくなると
、つまり、沃素に対して臭素の割合が大きくなると、再
点弧電圧が著しく上昇する。What is the output maintenance rate (%) of ultraviolet light with a wavelength of 220 to 330 nm after 1000 hours of lighting? The results of determining l+q are shown in Figure 3. As can be understood from this, in this case as well, as in the case where the halogen is iodine, when the RIBM becomes 2.2 or more, the output maintenance rate becomes 70% or more, but after that the output maintenance rate is better than in the case of iodine alone. It is large and can further extend the lamp life. This is presumably because the addition of bromine makes the halide more stable. And R
When the IBM exceeds 3.6, the restriking voltage increases significantly even though the output maintenance rate is 70% or more, and lighting becomes unstable and the lamp fails to turn off. Also,
When encapsulating a mixture of iodine and bromine as halogens,
The value of RBH is also important, and as the value of RBH increases, that is, the ratio of bromine to iodine increases, the restriking voltage increases significantly.
第４図は、ＲＢＨと出力維持率の関係を示すが。FIG. 4 shows the relationship between RBH and output maintenance rate.
ＲＢ Ｈが０．４ 以上になると出力維持率が大きくて
も不安定領域になり、ランプは立消え不良を起してしま
う、従って、結局のところ、ハロゲンが沃素と臭素の混
合物の場合は、２．２＜ＲＩＢＭく３．６およびＲＢＨ
＜０．４を満足することにより、ランプ寿命が長く、点
灯も安定して立消え不良を解消することができる６
〔発明の効果〕
以上説明したように、本発明は、発光管の内部に水銀、
マグネシウム、ハロゲンおよび希ガス、更には錫および
ビスマスの少なくとも一種以上が封入され、ハロゲンが
沃素もしくは沃素と臭素の混合物であって、波長が約２
２０〜３３０ｎｎ＋の範囲の出力の大きな金属蒸気放電
灯において、ハロゲンが沃素の場合は、２．２＜ＲＩＭ
＜３．６を満足し、ハロゲンが沃素と臭素の混合物の場
合は、２．２＜ ＲＩ Ｂ Ｍ ＜ ３ 、６およびＲ
Ｂ Ｉ−１＜ ０ 、４を満足するようにしたので、ラ
ンプ寿命が長く、再点弧時の安定性が良くて立消え不良
を生じず、とりわけ半導体製造におけるレジストの耐熱
性向上のための硬化工程用の紫外線光源ランプに適した
金属蒸気放電灯とすることができる。When RB H exceeds 0.4, the lamp becomes unstable even if the output maintenance rate is large, and the lamp fails to turn off. Therefore, if the halogen is a mixture of iodine and bromine, .2<RIBM 3.6 and RBH
By satisfying <0.4, the lamp life is long, the lighting is stable, and the failure to turn off can be eliminated.6 [Effects of the Invention] As explained above, the present invention has the advantage that mercury is not contained inside the arc tube. ,
Magnesium, halogen, rare gas, and at least one of tin and bismuth are enclosed, and the halogen is iodine or a mixture of iodine and bromine, and the wavelength is about 2.
In metal vapor discharge lamps with high output in the range of 20 to 330 nn+, when the halogen is iodine, 2.2<RIM
<3.6, and when the halogen is a mixture of iodine and bromine, 2.2<RI B M <3, 6 and R
Since it satisfies B I-1 < 0, 4, the lamp life is long, the stability at the time of re-ignition is good, there is no fading failure, and it is particularly useful for curing to improve the heat resistance of resists in semiconductor manufacturing. It can be made into a metal vapor discharge lamp suitable for an ultraviolet light source lamp for process use.
第１図は金属蒸気放電灯の断面図、第２図から第４図は
出力維持率の変化を示すグラフである。
１・・発光管 １１・・・シール部 ２・・・電極
３・・・モリブデン箔 ４・・・外導線第
図
第
図
１＼す／ｙ／す／Ｆｔ ＪｒＰＣ。
（）（ＩＭ）
第
図
第
図
Ｂｒ（’Ｒ９Ｈ）
ｒ＋ＥｌｒFIG. 1 is a sectional view of a metal vapor discharge lamp, and FIGS. 2 to 4 are graphs showing changes in output maintenance ratio. 1... Arc tube 11... Seal part 2... Electrode 3... Molybdenum foil 4... Outer conductor diagram Figure 1\S/y/S/Ft JrPC. () (IM) Figure Figure Br ('R9H) r+Elr
Claims (1)
）、沃素（Ｉ）および希ガス、更には錫（Ｓｎ）および
ビスマス（Ｂｉ）の少なくとも一種以上が封入され、 ２．２＜（Ｉの原子数）／（Ｍｇ＋Ｓｎ ａｎｄ／ｏｒＢｉの原子数）＜３．６ を満足することを特徴とする金属蒸気放電灯。 ２）発光管の内部に水銀（Ｈｇ）、マグネシウム（Ｍｇ
）、沃素（Ｉ）、臭素（Ｂｒ）および希ガス、更には錫
（Ｓｎ）およびビスマス（Ｂｉ）の少なくとも一種以上
が封入され、 ２．２＜（Ｉ＋Ｂｒの原子数）／（Ｍｇ＋Ｓｎａｎｄ／
ｏｒＢｉの原子数）＜３．６ および （Ｂｒの原子数）／（Ｉ＋Ｂｒの原子数）＜０．４を満
足することを特徴とする金属蒸気放電灯。[Claims] 1) Mercury (Hg) and magnesium (Mg) inside the arc tube.
), iodine (I), a rare gas, and at least one of tin (Sn) and bismuth (Bi) are enclosed, and 2.2<(number of atoms of I)/(number of atoms of Mg+Sn and/orBi)< 3.6 A metal vapor discharge lamp characterized by satisfying the following. 2) Mercury (Hg) and magnesium (Mg) are inside the arc tube.
), iodine (I), bromine (Br), and a rare gas, as well as at least one of tin (Sn) and bismuth (Bi), and 2.2<(number of atoms of I+Br)/(Mg+Snand/
A metal vapor discharge lamp characterized in that it satisfies (number of atoms of orBi)<3.6 and (number of atoms of Br)/(number of atoms of I+Br)<0.4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63208131A JP2553028B2 (en) | 1988-08-24 | 1988-08-24 | Metal vapor discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63208131A JP2553028B2 (en) | 1988-08-24 | 1988-08-24 | Metal vapor discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260044A true JPH0260044A (en) | 1990-02-28 |
| JP2553028B2 JP2553028B2 (en) | 1996-11-13 |
Family
ID=16551149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63208131A Expired - Fee Related JP2553028B2 (en) | 1988-08-24 | 1988-08-24 | Metal vapor discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2553028B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009064725A (en) * | 2007-09-07 | 2009-03-26 | Harison Toshiba Lighting Corp | Metal halide lamp |
| JP2012109233A (en) * | 2010-10-26 | 2012-06-07 | Ushio Inc | Long arc type discharge lamp and light irradiation device |
-
1988
- 1988-08-24 JP JP63208131A patent/JP2553028B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009064725A (en) * | 2007-09-07 | 2009-03-26 | Harison Toshiba Lighting Corp | Metal halide lamp |
| JP2012109233A (en) * | 2010-10-26 | 2012-06-07 | Ushio Inc | Long arc type discharge lamp and light irradiation device |
| TWI500068B (en) * | 2010-10-26 | 2015-09-11 | Ushio Electric Inc | Long arc discharge lamp, and light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2553028B2 (en) | 1996-11-13 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |