JPH0259495U - - Google Patents
Info
- Publication number
- JPH0259495U JPH0259495U JP13814788U JP13814788U JPH0259495U JP H0259495 U JPH0259495 U JP H0259495U JP 13814788 U JP13814788 U JP 13814788U JP 13814788 U JP13814788 U JP 13814788U JP H0259495 U JPH0259495 U JP H0259495U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- shaft
- axis direction
- fine movement
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13814788U JPH0639359Y2 (ja) | 1988-10-25 | 1988-10-25 | 微動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13814788U JPH0639359Y2 (ja) | 1988-10-25 | 1988-10-25 | 微動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0259495U true JPH0259495U (en, 2012) | 1990-05-01 |
| JPH0639359Y2 JPH0639359Y2 (ja) | 1994-10-12 |
Family
ID=31400218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13814788U Expired - Lifetime JPH0639359Y2 (ja) | 1988-10-25 | 1988-10-25 | 微動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639359Y2 (en, 2012) |
-
1988
- 1988-10-25 JP JP13814788U patent/JPH0639359Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639359Y2 (ja) | 1994-10-12 |