JPH025863U - - Google Patents

Info

Publication number
JPH025863U
JPH025863U JP8427788U JP8427788U JPH025863U JP H025863 U JPH025863 U JP H025863U JP 8427788 U JP8427788 U JP 8427788U JP 8427788 U JP8427788 U JP 8427788U JP H025863 U JPH025863 U JP H025863U
Authority
JP
Japan
Prior art keywords
support plate
substrate
board
swivel table
positioning member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8427788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0728691Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988084277U priority Critical patent/JPH0728691Y2/ja
Publication of JPH025863U publication Critical patent/JPH025863U/ja
Application granted granted Critical
Publication of JPH0728691Y2 publication Critical patent/JPH0728691Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988084277U 1988-06-25 1988-06-25 基板搬送装置 Expired - Lifetime JPH0728691Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988084277U JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988084277U JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH025863U true JPH025863U (US06229276-20010508-P00022.png) 1990-01-16
JPH0728691Y2 JPH0728691Y2 (ja) 1995-06-28

Family

ID=31308973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988084277U Expired - Lifetime JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0728691Y2 (US06229276-20010508-P00022.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397375A (en) * 1977-02-07 1978-08-25 Nissin Electric Co Ltd Device for producing semiconductor
JPS59170959U (ja) * 1983-05-02 1984-11-15 日新電機株式会社 イオン注入装置
JPS60216543A (ja) * 1984-04-11 1985-10-30 Nissin Electric Co Ltd ウエハのデイスクへの装着機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5397375A (en) * 1977-02-07 1978-08-25 Nissin Electric Co Ltd Device for producing semiconductor
JPS59170959U (ja) * 1983-05-02 1984-11-15 日新電機株式会社 イオン注入装置
JPS60216543A (ja) * 1984-04-11 1985-10-30 Nissin Electric Co Ltd ウエハのデイスクへの装着機構

Also Published As

Publication number Publication date
JPH0728691Y2 (ja) 1995-06-28

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