JPH0258350U - - Google Patents
Info
- Publication number
- JPH0258350U JPH0258350U JP13693688U JP13693688U JPH0258350U JP H0258350 U JPH0258350 U JP H0258350U JP 13693688 U JP13693688 U JP 13693688U JP 13693688 U JP13693688 U JP 13693688U JP H0258350 U JPH0258350 U JP H0258350U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- pressure sensor
- thin diaphragm
- semiconductor pressure
- small unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13693688U JPH0258350U (de) | 1988-10-20 | 1988-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13693688U JPH0258350U (de) | 1988-10-20 | 1988-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0258350U true JPH0258350U (de) | 1990-04-26 |
Family
ID=31397910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13693688U Pending JPH0258350U (de) | 1988-10-20 | 1988-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0258350U (de) |
-
1988
- 1988-10-20 JP JP13693688U patent/JPH0258350U/ja active Pending