JPH0258332U - - Google Patents
Info
- Publication number
- JPH0258332U JPH0258332U JP13830888U JP13830888U JPH0258332U JP H0258332 U JPH0258332 U JP H0258332U JP 13830888 U JP13830888 U JP 13830888U JP 13830888 U JP13830888 U JP 13830888U JP H0258332 U JPH0258332 U JP H0258332U
- Authority
- JP
- Japan
- Prior art keywords
- manifold
- drive shaft
- treatment apparatus
- flame treatment
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gas Burners (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
第１図はこの考案の一実施例の水素炎処理装置
を示す部分斜視図、第２図は、第１図の断面正面
図、第３図、第４図はこの考案のマニホルドを示
す側面図、第５図はこの考案の要部を示す部分断
面図、第６図は従来の水素炎処理装置を示す部分
斜視図、第７図は、第６図の正面断面図、第８図
は従来のマニホルドの回動状態を示す図である。
図において、１は駆動シヤフト、２は駆動ギヤ
、３は支持台、５はマニホルド、７はベアリング
、８はトーチ、８ａは火炎、９は取付台、１０は
半導体装置、１１は位置固定部、１２は位置決め
板、１２ａは位置決め穴、１３は位置固定具、１
５はボール、１６はばねである。なお、各図中の
同一符号は同一または相当部分を示す。
Fig. 1 is a partial perspective view showing a hydrogen flame treatment apparatus according to an embodiment of this invention, Fig. 2 is a sectional front view of Fig. 1, and Figs. 3 and 4 are side views showing a manifold of this invention. , FIG. 5 is a partial sectional view showing the main parts of this invention, FIG. 6 is a partial perspective view showing a conventional hydrogen flame treatment apparatus, FIG. 7 is a front sectional view of FIG. 6, and FIG. 8 is a conventional hydrogen flame treatment apparatus. FIG. 3 is a diagram showing a rotating state of the manifold. In the figure, 1 is a drive shaft, 2 is a drive gear, 3 is a support stand, 5 is a manifold, 7 is a bearing, 8 is a torch, 8a is a flame, 9 is a mounting base, 10 is a semiconductor device, 11 is a position fixing part, 12 is a positioning plate, 12a is a positioning hole, 13 is a positioning fixture, 1
5 is a ball and 16 is a spring. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
する複数のトーチを備えた回動可動なマニホルド
と、前記マニホルドの両端に固定された駆動シヤ
フトと、この駆動シヤフトの両端を支持する支持
台と、前記駆動シヤフトの一端に取り付けられ、
前記駆動シヤフトに回転動力を伝達する駆動ギヤ
と、前記マニホルドに固定され、前記マニホルド
を選定した位置に固定する位置固定手段を備えた
ことを特徴とする水素炎処理装置。 A rotatable manifold equipped with a plurality of torches that form different types of hydrogen flames on each side of the polyhedron, a drive shaft fixed to both ends of the manifold, and a support stand that supports both ends of the drive shaft. and attached to one end of the drive shaft;
A hydrogen flame treatment apparatus comprising: a drive gear that transmits rotational power to the drive shaft; and a position fixing means fixed to the manifold and fixing the manifold at a selected position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13830888U JPH0514511Y2 (en) | 1988-10-24 | 1988-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13830888U JPH0514511Y2 (en) | 1988-10-24 | 1988-10-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0258332U true JPH0258332U (en) | 1990-04-26 |
| JPH0514511Y2 JPH0514511Y2 (en) | 1993-04-19 |
Family
ID=31400528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13830888U Expired - Lifetime JPH0514511Y2 (en) | 1988-10-24 | 1988-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514511Y2 (en) |
-
1988
- 1988-10-24 JP JP13830888U patent/JPH0514511Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514511Y2 (en) | 1993-04-19 |