JPH0257965U - - Google Patents
Info
- Publication number
- JPH0257965U JPH0257965U JP13687188U JP13687188U JPH0257965U JP H0257965 U JPH0257965 U JP H0257965U JP 13687188 U JP13687188 U JP 13687188U JP 13687188 U JP13687188 U JP 13687188U JP H0257965 U JPH0257965 U JP H0257965U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- reaction tube
- cooling
- cooling pipe
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13687188U JPH0613263Y2 (ja) | 1988-10-20 | 1988-10-20 | Ｍｏｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13687188U JPH0613263Y2 (ja) | 1988-10-20 | 1988-10-20 | Ｍｏｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257965U true JPH0257965U (nl) | 1990-04-26 |
| JPH0613263Y2 JPH0613263Y2 (ja) | 1994-04-06 |
Family
ID=31397785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13687188U Expired - Lifetime JPH0613263Y2 (ja) | 1988-10-20 | 1988-10-20 | Ｍｏｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613263Y2 (nl) |
-
1988
- 1988-10-20 JP JP13687188U patent/JPH0613263Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613263Y2 (ja) | 1994-04-06 |