JPH0257861B2 - - Google Patents
Info
- Publication number
- JPH0257861B2 JPH0257861B2 JP4043084A JP4043084A JPH0257861B2 JP H0257861 B2 JPH0257861 B2 JP H0257861B2 JP 4043084 A JP4043084 A JP 4043084A JP 4043084 A JP4043084 A JP 4043084A JP H0257861 B2 JPH0257861 B2 JP H0257861B2
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- dust
- space
- clean
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 18
- 239000002245 particle Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 239000000057 synthetic resin Substances 0.000 claims description 4
- 238000010998 test method Methods 0.000 claims description 4
- 230000003749 cleanliness Effects 0.000 claims description 3
- 238000011156 evaluation Methods 0.000 claims description 2
- 239000000356 contaminant Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
Description
【発明の詳細な説明】
半導体工場、医薬品工場を始めとして最近では
高度の清浄空間を維持する施設への要求が各方面
で強まり、クリーンルーム、或いはバイオクリー
ンルームとしてその建設需要が増大してきてい
る。[Detailed Description of the Invention] Recently, there has been an increasing demand for facilities that maintain highly clean spaces in various fields, including semiconductor factories and pharmaceutical factories, and the demand for the construction of clean rooms or bio-clean rooms has been increasing.
このような清浄空間を確保するためには、一般
の建物にはない特別な配慮が必要で、設備面では
高性能フイタ(HEPAフイルタ)を使用し、高
度な換気回数で空気調和が図られる。一方建築的
な面においては汚染物質を入れないように気密性
を確保し、汚染物質を滞留させない凹凸の少ない
構造、そして汚染物質を発生しない3要素が要求
される。中でも壁、床、天井を構成する材料に発
塵性の少ないものを選ぶことが清浄空間を確保す
る上で重要な要素となつている。 In order to ensure such a clean space, special considerations not found in ordinary buildings are required, and in terms of equipment, high-performance filters (HEPA filters) are used and air conditioning is achieved with a high ventilation rate. On the other hand, in terms of architecture, three elements are required: airtightness to prevent contaminants from entering, a structure with few irregularities to prevent contaminants from accumulating, and a structure that does not generate contaminants. In particular, selecting materials that generate less dust for walls, floors, and ceilings is an important factor in ensuring a clean space.
しかしながら実際には発塵し難い材料といつて
も、定量的に確認された技術的データは殆んどな
く、推定の域を脱しないままに使用されているの
が現状である。 However, even though it is actually a material that does not easily generate dust, there is almost no quantitatively confirmed technical data, and the current situation is that it is used without going beyond the realm of speculation.
本発明はこのような現状に鑑みて提案されたも
ので、高度の空気清浄度の確保された空間内に配
設された供試体表面に金属製若しくは合成樹脂製
のブラシによつて物理的外力を与えて前記供試体
を強制的に発塵させ、かくして発生した前記空間
内における浮遊微粒子の数を測定することを特徴
とする発塵性評価試験方法に係り、その目的とす
る処は、建築材料の発塵性を定量的に評価するこ
とのできる新規有用な試験方法を供する点にあ
る。 The present invention was proposed in view of the current situation, and uses a brush made of metal or synthetic resin to apply physical external force to the surface of a specimen placed in a space where a high degree of air cleanliness is ensured. The test method for evaluating dust generation is characterized by forcibly causing the specimen to generate dust by giving a The object of the present invention is to provide a new and useful test method that can quantitatively evaluate the dust generation properties of materials.
本発明においては前記したように、一般の居住
空間等より切離して設けられた高度の空気清浄度
の確保された空間内に供試体を配置し、同供試体
の表面に金属製または合成樹脂製のブラシによつ
て外力を加えることによつて前記供試体を強制的
に発塵させ、かくして前記空間内に浮遊する微粒
子の数を測定するようにしたので、前記供試体の
発塵性を定量的に評価することができる。 In the present invention, as described above, a specimen is placed in a space that is separated from a general living space and has a high degree of air cleanliness, and the surface of the specimen is made of metal or synthetic resin. By applying an external force using a brush, the specimen was forcibly made to generate dust, and the number of fine particles floating in the space was measured. can be evaluated based on
以下本発明を図示の実施例について説明する。 The present invention will be described below with reference to the illustrated embodiments.
1は一般の居住空間から切離して局所的に高度
の清浄空間を確保するように構成成されたクリー
ンチヤンバで、HEPAフイルタ2、プレフイル
タ(図示せず)及びシロツコフアン(図示せず)
が配設されている。 Reference numeral 1 denotes a clean chamber separated from the general living space to ensure a locally highly clean space, which includes a HEPA filter 2, a prefilter (not shown), and a Sirotskov fan (not shown).
is installed.
前記クリーンチヤンバ1内底部には発塵装置3
が配設され、同発塵装置3に設けられたモータ4
によつて駆動回転されるターンテーブル5上に供
試体6が載置され、前記発塵装置3に植立された
支柱7に支持された金属製または合成樹脂製ブラ
シ8が、前記ターンテーブル5の回転に伴つて供
試体6の表面を擦過するように構成されている。
図中9は1個当り500gの重量負荷を持つカウン
タウエイトである。 A dust generating device 3 is installed at the bottom of the clean chamber 1.
is arranged, and a motor 4 provided in the dust generating device 3
A specimen 6 is placed on a turntable 5 which is driven and rotated by a metal or synthetic resin brush 8 supported by a support 7 erected on the dust generating device 3. The surface of the specimen 6 is rubbed as the specimen 6 rotates.
9 in the figure is a counterweight with a weight load of 500g each.
而して所定の大きさ、例えば直径10.5mmで中心
にターンテーブル5の回転軸に対する固定用の4
mm径の透孔を有する供試体6をターンテーブル5
に載置し、クリーンチヤンバ1の扉を開放した状
態でシロツコフアンを作動させて供試体6の表面
を清掃する。 Then, there is a hole of a predetermined size, for example, a diameter of 10.5 mm, with a 4-inch hole at the center for fixing to the rotation axis of the turntable 5.
A test piece 6 with a through hole of mm diameter was placed on a turntable 5.
The surface of the specimen 6 is cleaned by operating the Sirocco fan with the door of the clean chamber 1 open.
次いで扉を閉じ、更に前記フアンを作動してク
リーンチヤンバ1内の浮遊微粒子をすべて除去し
たのち前記フアンを停止する。 Next, the door is closed, and after operating the fan to remove all floating particles in the clean chamber 1, the fan is stopped.
1分後発塵装置3のモータ4を作動してターン
テーブル5を60r.p.m.の回転速度で駆動回転して
供試体6の表面を前記ブラシ8で擦過し、10分間
強制的に発塵させる。 After 1 minute, the motor 4 of the dust generating device 3 is activated to drive and rotate the turntable 5 at a rotational speed of 60 rpm, and the surface of the specimen 6 is rubbed with the brush 8, and dust is forcibly generated for 10 minutes.
発塵装置3の作動と同時にクリーンチヤンバ1
内の空気をサンプリングチユーブ10を介して毎
分毎に吸引(0.01cft/min.)し、光散乱式粒子
計数器等によつて浮遊微粒子を測定する。 The clean chamber 1 is activated at the same time as the dust generator 3 is activated.
The air inside the chamber is sucked every minute (0.01 cft/min.) through the sampling tube 10, and suspended particles are measured using a light scattering particle counter or the like.
かくして10分間測定した浮遊微粒子の総数で発
塵量を評価する。 The amount of dust generated is evaluated based on the total number of suspended particles measured for 10 minutes.
以上本発明を実施例について説明したが、本発
明は勿論このような実施例にだけ局限されるもの
ではなく、本発明の精神を逸脱しない範囲内で
種々の設計の改変を施しうるものである。 Although the present invention has been described above with reference to embodiments, the present invention is, of course, not limited to such embodiments, and can be modified in various ways without departing from the spirit of the present invention. .
第1図は本発明に係る発塵性評価試験方法の実
施状況を示す縦断面図、第2図及び第3図は夫々
発塵装置部分の正面図、並に側面図である。
1……クリーンチヤンバ、3……発塵装置、5
……ターンテーブル、6……供試体、8……ブラ
シ、9……カウンタウエイト。
FIG. 1 is a longitudinal cross-sectional view showing the state of implementation of the dust generation evaluation test method according to the present invention, and FIGS. 2 and 3 are a front view and a side view of a part of the dust generation device, respectively. 1... Clean chamber, 3... Dust generator, 5
...Turntable, 6...Specimen, 8...Brush, 9...Counterweight.
Claims (1)
された供試体表面に金属製若しくは合成樹脂製の
ブラシによつて物理的外力を与えて前記供試体を
強制的に発塵させ、かくして発生した前記空間内
における浮遊微粒子の数を測定することを特徴と
する発塵性評価試験方法。1. A physical external force is applied to the surface of a specimen placed in a space where a high degree of air cleanliness is ensured using a brush made of metal or synthetic resin to forcibly cause the specimen to generate dust. A dust generation evaluation test method characterized by measuring the number of floating particles generated in the space.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4043084A JPS60185138A (en) | 1984-03-05 | 1984-03-05 | Dusting-characteristic evaluating and testing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4043084A JPS60185138A (en) | 1984-03-05 | 1984-03-05 | Dusting-characteristic evaluating and testing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60185138A JPS60185138A (en) | 1985-09-20 |
JPH0257861B2 true JPH0257861B2 (en) | 1990-12-06 |
Family
ID=12580428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4043084A Granted JPS60185138A (en) | 1984-03-05 | 1984-03-05 | Dusting-characteristic evaluating and testing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60185138A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0785045B2 (en) * | 1987-02-25 | 1995-09-13 | 東京エレクトロン株式会社 | Dust generation measurement method |
FR2612294A1 (en) * | 1987-03-09 | 1988-09-16 | Rhone Poulenc Chimie | Device for measuring the pulverulence of a solid product |
DE10140426B4 (en) * | 2001-08-17 | 2005-03-24 | Mars Inc. | Apparatus and method for investigating the dustiness of substances |
-
1984
- 1984-03-05 JP JP4043084A patent/JPS60185138A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60185138A (en) | 1985-09-20 |
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