JPH0257270U - - Google Patents

Info

Publication number
JPH0257270U
JPH0257270U JP13388588U JP13388588U JPH0257270U JP H0257270 U JPH0257270 U JP H0257270U JP 13388588 U JP13388588 U JP 13388588U JP 13388588 U JP13388588 U JP 13388588U JP H0257270 U JPH0257270 U JP H0257270U
Authority
JP
Japan
Prior art keywords
electrical machine
rotating electrical
rotating
cover
monitoring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13388588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13388588U priority Critical patent/JPH0257270U/ja
Publication of JPH0257270U publication Critical patent/JPH0257270U/ja
Pending legal-status Critical Current

Links

JP13388588U 1988-10-13 1988-10-13 Pending JPH0257270U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13388588U JPH0257270U (enrdf_load_stackoverflow) 1988-10-13 1988-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13388588U JPH0257270U (enrdf_load_stackoverflow) 1988-10-13 1988-10-13

Publications (1)

Publication Number Publication Date
JPH0257270U true JPH0257270U (enrdf_load_stackoverflow) 1990-04-25

Family

ID=31392160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13388588U Pending JPH0257270U (enrdf_load_stackoverflow) 1988-10-13 1988-10-13

Country Status (1)

Country Link
JP (1) JPH0257270U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220039291A (ko) * 2020-09-22 2022-03-29 삼성전자주식회사 회전 샤프트의 회전 상태 모니터링이 가능한 반도체 제조 설비

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220039291A (ko) * 2020-09-22 2022-03-29 삼성전자주식회사 회전 샤프트의 회전 상태 모니터링이 가능한 반도체 제조 설비

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