JPH0257270U - - Google Patents
Info
- Publication number
- JPH0257270U JPH0257270U JP13388588U JP13388588U JPH0257270U JP H0257270 U JPH0257270 U JP H0257270U JP 13388588 U JP13388588 U JP 13388588U JP 13388588 U JP13388588 U JP 13388588U JP H0257270 U JPH0257270 U JP H0257270U
- Authority
- JP
- Japan
- Prior art keywords
- electrical machine
- rotating electrical
- rotating
- cover
- monitoring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012806 monitoring device Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000005856 abnormality Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388588U JPH0257270U (OSRAM) | 1988-10-13 | 1988-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388588U JPH0257270U (OSRAM) | 1988-10-13 | 1988-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257270U true JPH0257270U (OSRAM) | 1990-04-25 |
Family
ID=31392160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13388588U Pending JPH0257270U (OSRAM) | 1988-10-13 | 1988-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257270U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220039291A (ko) * | 2020-09-22 | 2022-03-29 | 삼성전자주식회사 | 회전 샤프트의 회전 상태 모니터링이 가능한 반도체 제조 설비 |
-
1988
- 1988-10-13 JP JP13388588U patent/JPH0257270U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220039291A (ko) * | 2020-09-22 | 2022-03-29 | 삼성전자주식회사 | 회전 샤프트의 회전 상태 모니터링이 가능한 반도체 제조 설비 |