JPH0256442U - - Google Patents

Info

Publication number
JPH0256442U
JPH0256442U JP13562588U JP13562588U JPH0256442U JP H0256442 U JPH0256442 U JP H0256442U JP 13562588 U JP13562588 U JP 13562588U JP 13562588 U JP13562588 U JP 13562588U JP H0256442 U JPH0256442 U JP H0256442U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
substantially equivalent
orientation flat
vacuum
spin chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13562588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13562588U priority Critical patent/JPH0256442U/ja
Publication of JPH0256442U publication Critical patent/JPH0256442U/ja
Pending legal-status Critical Current

Links

JP13562588U 1988-10-18 1988-10-18 Pending JPH0256442U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13562588U JPH0256442U (US07534539-20090519-C00280.png) 1988-10-18 1988-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13562588U JPH0256442U (US07534539-20090519-C00280.png) 1988-10-18 1988-10-18

Publications (1)

Publication Number Publication Date
JPH0256442U true JPH0256442U (US07534539-20090519-C00280.png) 1990-04-24

Family

ID=31395420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13562588U Pending JPH0256442U (US07534539-20090519-C00280.png) 1988-10-18 1988-10-18

Country Status (1)

Country Link
JP (1) JPH0256442U (US07534539-20090519-C00280.png)

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