JPH0256342U - - Google Patents
Info
- Publication number
- JPH0256342U JPH0256342U JP13559088U JP13559088U JPH0256342U JP H0256342 U JPH0256342 U JP H0256342U JP 13559088 U JP13559088 U JP 13559088U JP 13559088 U JP13559088 U JP 13559088U JP H0256342 U JPH0256342 U JP H0256342U
- Authority
- JP
- Japan
- Prior art keywords
- signal output
- signal
- converter
- frequency
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13559088U JPH0648737Y2 (ja) | 1988-10-18 | 1988-10-18 | イオン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13559088U JPH0648737Y2 (ja) | 1988-10-18 | 1988-10-18 | イオン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0256342U true JPH0256342U (enExample) | 1990-04-24 |
| JPH0648737Y2 JPH0648737Y2 (ja) | 1994-12-12 |
Family
ID=31395352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13559088U Expired - Lifetime JPH0648737Y2 (ja) | 1988-10-18 | 1988-10-18 | イオン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648737Y2 (enExample) |
-
1988
- 1988-10-18 JP JP13559088U patent/JPH0648737Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648737Y2 (ja) | 1994-12-12 |
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