JPH0256108B2 - - Google Patents
Info
- Publication number
- JPH0256108B2 JPH0256108B2 JP59009705A JP970584A JPH0256108B2 JP H0256108 B2 JPH0256108 B2 JP H0256108B2 JP 59009705 A JP59009705 A JP 59009705A JP 970584 A JP970584 A JP 970584A JP H0256108 B2 JPH0256108 B2 JP H0256108B2
- Authority
- JP
- Japan
- Prior art keywords
- agent
- extinguishing
- fire extinguishing
- copper oxide
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003795 chemical substances by application Substances 0.000 claims description 33
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 15
- 239000005751 Copper oxide Substances 0.000 claims description 14
- 229910000431 copper oxide Inorganic materials 0.000 claims description 14
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 12
- 239000004254 Ammonium phosphate Substances 0.000 claims description 6
- 229910000148 ammonium phosphate Inorganic materials 0.000 claims description 6
- 235000019289 ammonium phosphates Nutrition 0.000 claims description 6
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 claims description 6
- 239000012752 auxiliary agent Substances 0.000 claims description 5
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052921 ammonium sulfate Inorganic materials 0.000 claims description 4
- 235000011130 ammonium sulphate Nutrition 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- -1 alkali metal bicarbonate Chemical class 0.000 claims description 2
- 239000002075 main ingredient Substances 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 239000007789 gas Substances 0.000 description 20
- 238000002485 combustion reaction Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 229910000077 silane Inorganic materials 0.000 description 6
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 2
- 235000015497 potassium bicarbonate Nutrition 0.000 description 2
- 239000011736 potassium bicarbonate Substances 0.000 description 2
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 2
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 2
- 235000017557 sodium bicarbonate Nutrition 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Fire-Extinguishing Compositions (AREA)
Description
本発明はエピタキシヤルガスの消火および不燃
化用薬剤に関する。
従来一般に用いられている粉末消火薬剤には、
重炭酸アルカリ金属塩や燐酸アンモニウム塩、硫
酸アンモニウム塩を主剤としたものが多く、木材
等の一般火災に対して大きな消火効力を発揮する
ものであることは知られている。
ところが近年電子機器の発達に伴い半導体の製
造がさかんとなるに至り、とくにシラン（SiH4）
やトリクロルシラン（SiHcl3）、あるいはジクロ
ルシラン（SiH2cl2）等のエピタキシヤルガスの
消費量が急速に増大してきた。
これらのガスはその分子構造中に水素を含み、
低酸素濃度雰囲気においても自然発火してしまう
という特異な性質をもつためにその取扱いには厳
重を要し、扱いを誤ると発火し、しかも一般の消
火薬剤を散布して一時的に消火させてもただちに
再発火するという恐るべき危険性を内在してい
る。
したがつてこのようなガスの火災に対して従来
の消火薬剤を用いても結局効果がなく、これらの
ガス火災に対する有効な消火薬剤の出現が熱望さ
れていたところである。
本発明は従来のかかる期待に応えるものであつ
て、具体的には粉末消火薬剤の主剤および／また
は助剤に対し、酸化銅または塩化銅の一定量を添
加したことを特徴とするエピタキシヤルガスの消
火および不燃化剤に関する。
以下本発明の具体的な内容を図示の実施例をも
とに説明すると、
粉末消火剤の主剤として、重炭酸ナトリウム、
重炭酸カリウム、燐酸アンモニウム、硫酸アンモ
ニウムのうち一種または二種以上を選定し、これ
を144μ以下の粒径に微粉砕したものを用いる。
粉末消火剤の助剤としては、上記主剤に対して
微細無水硅酸（ホワイトカーボン）を３重量％お
よびシリコーンオイル１重量％をそれぞれ添加し
た後、従来と同様の方法により加熱撹拌して主剤
に流動性を付与する。
また上記した粉末消火剤の主剤および／または
助剤に対して添加される酸化銅あるいは塩化銅は
これを粉末消火薬剤に添加して使用した場合にお
いて、消火後に残留するエピタキシヤルガスと反
応してこれを不燃安定化させる。
この場合の反応方程式を示せばつぎのようにな
る。エピタキシヤルガスの一例としてシラン
（SiH4）を用いた場合において、
燃焼：SiH4→Si＋2H2
空気中の酸素
Si＋2H2＋2O2→SiO2＋2H2O
不燃安定化：SiH4→Si＋2H2
Si＋2H2＋酸化銅又は塩化銅
CuO＝Cu＋2H2O
Cucl2＝Cu＋2Hcl
Hcl＋粉末消火薬剤
NaHCO3→Nacl＋CO2＋H2O
（含有水素を水にして不燃安定化をはかる）
酸化銅あるいは塩化銅の添加量についてみれ
ば、実験の結果では上記主剤に助剤を添加した粉
末消火薬剤に対して３重量％以下の場合にはエピ
タキシヤルガスの消火後における不燃安定性に乏
しいために多量の消火薬剤散布を必要とするので
不経済となる。逆に30％以上の添加量とした場合
においては速消性が失われるために同じく多量の
消火薬剤散布を必要として不経済となる。
このような傾向からみて消火薬剤に対する酸化
銅あるいは塩化銅の好ましい添加量は３〜30％の
範囲であることが必要である。
実験例
粉末消火薬剤のサンプルとしてつぎのものを用
意した。
重炭酸ナトリウムを主剤とした消火薬剤
重炭酸カリウムを主剤とした消火薬剤
燐酸アンモニウムを主剤とした消火薬剤
（以上従来品）
上記に対して酸化銅又は塩化銅を5.0重量
％添加品
上記に対して酸化銅又は塩化銅を25.0重量
％添加品
上記に対して酸化銅又は塩化銅を5.0重量
％添加品
上記に対して酸化銅又は塩化銅を25.0重量
％添加品
燐酸アンモニウム70重量％と硫酸アンモニウ
ム30重量％との混合品を主剤とし、これに酸化
銅又は塩化銅を3.0重量％添加品
の主剤に対し酸化銅又は塩化銅を30.0重量
％添加品
（以上〜は本発明品）
消火試験器として第１図に示した構成のものを
使用した。
第１図の試験器は透明な、しかも密封されたガ
ラス製燃焼容器１と、ガラス容器の上方に位置す
るサンプル供給容器２と、ガラス製燃焼容器１内
に通ずるパイプ５を通じてエピタキシヤルガスを
供給するエピタキシヤルガスボンベ４と、排気パ
イプ６とガラス製燃焼容器１内に通ずるパイプ７
を通じて送風する送風器８とから構成されてい
る。
上記の消火試験器を使用してガラス製燃焼容器
１内が酸欠とならないように送風器８により送風
し、ガラス容器内から排気パイプ６を通じて排気
する。エピタキシヤルガスボンベ４内の収容ガス
としてはシランガス（SiH4）を用い、これを定
量パイプ５を通じてガラス製燃焼容器１内に送り
込んで送風機８からの空気と接触させる。空気と
接触したエピタキシヤルガスは自然発火して炎上
する。
一方サンプル供給容器２内には予め用意された
粉末消火薬剤を収容しておき、これをコツク３を
調整しながらガラス製燃焼容器１内に一定量供給
し、ガラス製燃焼容器１内において燃焼するシラ
ンガスの消火の程度および消火後における再発火
の有無について各種サンプル毎に実験を繰り返し
て効果を判定したところ、つぎの試験結果を得
た。
The present invention relates to an agent for extinguishing and rendering epitaxial gas nonflammable. The powder fire extinguishing agents commonly used include:
Many of them are based on alkali metal bicarbonate, ammonium phosphate, or ammonium sulfate, and are known to have great extinguishing effects on general fires involving wood and other fires. However, in recent years, with the development of electronic devices, the production of semiconductors has become popular, and silane (SiH 4 )
The consumption of epitaxial gases such as silane, trichlorosilane (SiHcl 3 ), and dichlorosilane (SiH 2 cl 2 ) has been rapidly increasing. These gases contain hydrogen in their molecular structure,
Because it has the unique property of spontaneously combusting even in an atmosphere with low oxygen concentration, it must be handled with great care; if mishandled, it can ignite, and it must be temporarily extinguished by spraying common fire extinguishing agents. There is also a frightening danger that it will immediately re-ignite. Therefore, even if conventional extinguishing agents are used against such gas fires, they are ultimately ineffective, and the emergence of effective extinguishing agents against these gas fires has been eagerly awaited. The present invention meets these conventional expectations, and specifically, the present invention is an epitaxial gas characterized by adding a certain amount of copper oxide or copper chloride to the main agent and/or auxiliary agent of a powder fire extinguishing agent. Concerning fire extinguishing and flame retardants. The specific content of the present invention will be explained below based on the illustrated embodiments.
One or more of potassium bicarbonate, ammonium phosphate, and ammonium sulfate are selected and pulverized to a particle size of 144μ or less is used. As auxiliary agents for powder fire extinguishing agents, 3% by weight of fine silicic anhydride (white carbon) and 1% by weight of silicone oil are added to the above-mentioned main agent, and then heated and stirred in the same manner as conventional methods to form the main agent. Provides liquidity. In addition, when copper oxide or copper chloride, which is added to the main agent and/or auxiliary agent of the above-mentioned dry powder fire extinguishing agent, is added to the powder fire extinguishing agent and used, it reacts with the epitaxial gas remaining after extinguishing. This is made non-combustible and stable. The reaction equation in this case is as follows. When using silane (SiH 4 ) as an example of epitaxial gas, combustion: SiH 4 →Si+2H 2 Oxygen in the air Si+2H 2 +2O 2 →SiO 2 +2H 2 O Non-flammable stabilization: SiH 4 →Si+2H 2 Si+2H 2 + Copper oxide or copper chloride CuO = Cu + 2H 2 O Cucl 2 = Cu + 2Hcl Hcl + powder fire extinguishing agent NaHCO 3 → Nacl + CO 2 + H 2 O (Contained hydrogen is converted into water to stabilize nonflammability) Regarding the amount of copper oxide or copper chloride added: According to the results of experiments, if the amount is less than 3% by weight of the powder extinguishing agent, which is made by adding an auxiliary agent to the main agent, it is necessary to spray a large amount of extinguishing agent because the non-flammability stability after extinguishing the epitaxial gas is poor. Therefore, it becomes uneconomical. On the other hand, if the amount added is 30% or more, the quick extinguishing properties are lost, and a large amount of fire extinguishing agent must be sprayed, which becomes uneconomical. In view of this tendency, the preferable amount of copper oxide or copper chloride added to the fire extinguishing agent needs to be in the range of 3 to 30%. Experimental example The following powder extinguishing agent samples were prepared. Extinguishing agent based on sodium bicarbonate Extinguishing agent based on potassium bicarbonate Extinguishing agent based on ammonium phosphate (conventional products) Products with 5.0% by weight of copper oxide or copper chloride added to the above products Regarding the above products A product with 25.0% by weight of copper oxide or copper chloride A product with 5.0% by weight of copper oxide or copper chloride in the above product A product with 25.0% by weight of copper oxide or copper chloride in the above product 70% by weight of ammonium phosphate and 30% by weight of ammonium sulfate %, and 3.0% by weight of copper oxide or copper chloride is added to this as the main component.A product with 30.0% by weight of copper oxide or copper chloride added to the main component. The configuration shown in Figure 1 was used. The test device shown in FIG. 1 includes a transparent and sealed glass combustion vessel 1, a sample supply vessel 2 located above the glass vessel, and an epitaxial gas supplied through a pipe 5 leading into the glass combustion vessel 1. an epitaxial gas cylinder 4, an exhaust pipe 6, and a pipe 7 leading into the glass combustion vessel 1.
The air blower 8 is configured to blow air through the air blower 8. Using the fire extinguishing tester described above, air is blown with the blower 8 so that the inside of the glass combustion container 1 does not become deficient in oxygen, and the inside of the glass container is exhausted through the exhaust pipe 6. Silane gas (SiH 4 ) is used as the gas contained in the epitaxial gas cylinder 4, and is fed into the glass combustion vessel 1 through the metering pipe 5 and brought into contact with air from the blower 8. Epitaxial gas that comes into contact with air spontaneously ignites and bursts into flames. On the other hand, a powder fire extinguishing agent prepared in advance is stored in the sample supply container 2, and a certain amount of this is supplied into the glass combustion container 1 while adjusting the pot 3, and is combusted in the glass combustion container 1. Experiments were repeated on various samples to determine the degree of extinguishing of silane gas and the presence or absence of re-ignition after extinguishing, and the following test results were obtained.
【表】【table】
【表】
上記の実験結果からみても明らかであるよう
に、シラン、あるいはトリクロルシラン等の如き
エピタキシヤルガスに対しては従来の重炭酸ナト
リウムや燐酸アンモニウム等を主剤とした消火薬
剤ではほとんど効果がなく、これらの消火薬剤に
対して３〜30重量％の酸化銅または塩化銅を添加
することによりはじめて自然発火の消火と、消火
後における確実な不燃安定化をはかり得ることが
明らかとなつた。
しかるに本発明によれば従来の粉末消火薬剤に
酸化銅または塩化銅を添加するだけでよいのでエ
ピタキシヤルガス専用の防災処理剤を準備する場
合に比較してきわめて経済的である。[Table] As is clear from the above experimental results, conventional extinguishing agents based on sodium bicarbonate or ammonium phosphate have little effect on epitaxial gases such as silane or trichlorosilane. It has become clear that by adding 3 to 30% by weight of copper oxide or copper chloride to these fire extinguishing agents, it is possible to extinguish spontaneous combustion and ensure reliable nonflammability after extinguishing. However, according to the present invention, it is only necessary to add copper oxide or copper chloride to the conventional powder fire extinguishing agent, which is extremely economical compared to preparing a disaster prevention treatment agent specifically for epitaxial gas.
第１図はエピタキシヤルガスの消火実験に使用
するための消火試験器の概略図である。
１……ガラス製燃焼容器、２……サンプル供給
容器、４……エピタキシヤルガスボンベ、６……
排気パイプ、８……送風機。
FIG. 1 is a schematic diagram of a fire extinguishing tester used in epitaxial gas extinguishing experiments. 1...Glass combustion vessel, 2...Sample supply container, 4...Epitaxial gas cylinder, 6...
Exhaust pipe, 8...Blower.
Claims (1)
し、酸化銅または塩化銅を添加したことを特徴と
するエピタキシヤルガスの消火および不燃化用薬
剤。 ２ 特許請求の範囲第１項に記載のものにおい
て、粉末消火薬剤の主剤として重炭酸アルカリ金
属塩または燐酸アンモニウム塩、硫酸アンモニウ
ム塩またはこれらの混合塩のうち一種または二種
以上を用いたものであるところのエピタキシヤル
ガスの消火および不燃化用薬剤。[Scope of Claims] 1. An agent for extinguishing and making epitaxial gas nonflammable, characterized in that copper oxide or copper chloride is added to the main agent and/or auxiliary agent of a powder extinguishing agent. 2. In the product described in claim 1, the powder fire extinguishing agent uses one or more of alkali metal bicarbonate, ammonium phosphate, ammonium sulfate, or a mixed salt thereof as the main ingredient. However, it is an agent for extinguishing epitaxial gas and making it nonflammable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP970584A JPS60153880A (en) | 1984-01-23 | 1984-01-23 | Powdery fire extinguishing agent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP970584A JPS60153880A (en) | 1984-01-23 | 1984-01-23 | Powdery fire extinguishing agent |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60153880A JPS60153880A (en) | 1985-08-13 |
| JPH0256108B2 true JPH0256108B2 (en) | 1990-11-29 |
Family
ID=11727652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP970584A Granted JPS60153880A (en) | 1984-01-23 | 1984-01-23 | Powdery fire extinguishing agent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60153880A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013023576A1 (en) * | 2011-08-16 | 2013-02-21 | 陕西坚瑞消防股份有限公司 | Fire extinguishing composition of copper salts |
| CN113292316A (en) * | 2021-05-10 | 2021-08-24 | 江苏苏嘉集团新材料有限公司 | Refractory brick capable of permeating water and reducing temperature at high temperature and processing technology |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS532999A (en) * | 1976-06-30 | 1978-01-12 | Hochiki Co | Method of extinguishing fire |
-
1984
- 1984-01-23 JP JP970584A patent/JPS60153880A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS532999A (en) * | 1976-06-30 | 1978-01-12 | Hochiki Co | Method of extinguishing fire |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013023576A1 (en) * | 2011-08-16 | 2013-02-21 | 陕西坚瑞消防股份有限公司 | Fire extinguishing composition of copper salts |
| CN102949800A (en) * | 2011-08-16 | 2013-03-06 | 陕西坚瑞消防股份有限公司 | Copper salt fire-extinguishing composition |
| US9295864B2 (en) | 2011-08-16 | 2016-03-29 | Xi'an J&R Fire Fighting Equipment Co., Ltd. | Fire extinguishing composition of copper salts |
| CN113292316A (en) * | 2021-05-10 | 2021-08-24 | 江苏苏嘉集团新材料有限公司 | Refractory brick capable of permeating water and reducing temperature at high temperature and processing technology |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60153880A (en) | 1985-08-13 |
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