JPH0255211U - - Google Patents
Info
- Publication number
- JPH0255211U JPH0255211U JP13511688U JP13511688U JPH0255211U JP H0255211 U JPH0255211 U JP H0255211U JP 13511688 U JP13511688 U JP 13511688U JP 13511688 U JP13511688 U JP 13511688U JP H0255211 U JPH0255211 U JP H0255211U
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- sample surface
- objective lens
- focus
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Microscoopes, Condenser (AREA)
Description
第１図は本考案にかかる顕微鏡の実施例を示す
光学配置図、第２図は本考案の応用例を示すブロ
ツク図、第３図は同上応用例の動作を示すフロー
チヤート、第４図は同上応用例の画像入力装置に
よつて得られる画像の例を示す正面図、第５図は
上記応用例の試料の姿勢計測動作を示すフローチ
ヤート、第６図は本考案を応用することができる
磁気ヘツドの姿勢計測の原理を概略的に示す説明
図、第７図は磁気ヘツドの異なる姿勢での上記姿
勢計測の様子を示す説明図、第８図は従来の干渉
対物レンズを有する顕微鏡の例を示す光学配置図
である。
１，２…試料としての磁気ヘツド、４…顕微鏡
、５…画像入力装置としてのテレビカメラ、４１
…干渉対物レンズ、Ｆ…設計上の結像点。
Fig. 1 is an optical layout diagram showing an embodiment of the microscope according to the present invention, Fig. 2 is a block diagram showing an application example of the invention, Fig. 3 is a flowchart showing the operation of the above application example, and Fig. 4 is a diagram showing the operation of the above application example. A front view showing an example of an image obtained by the image input device of the application example above, FIG. 5 is a flowchart showing the operation of measuring the posture of the sample in the application example above, and FIG. 6 is a diagram to which the present invention can be applied. An explanatory diagram schematically showing the principle of attitude measurement of a magnetic head. Fig. 7 is an explanatory diagram showing the state of the above-mentioned attitude measurement in different orientations of the magnetic head. Fig. 8 is an example of a microscope having a conventional interference objective lens. FIG. 1, 2...Magnetic head as a sample, 4...Microscope, 5...TV camera as an image input device, 41
...Interference objective lens, F... Designed imaging point.
Claims (1)
顕微鏡の光軸上の上記干渉対物レンズの設計上の
結像点よりずらした位置に画像入力装置を設置し
、上記顕微鏡と試料面とを光軸方向に相対移動さ
せることにより、試料面に焦点を合わせ、また試
料面に発生する干渉縞に焦点を合わせることがで
きることを特徴とする顕微鏡。 In a microscope having an interference objective lens, an image input device is installed at a position shifted from the designed image forming point of the interference objective lens on the optical axis of the microscope, and the microscope and the sample surface are set relative to each other in the optical axis direction. A microscope characterized in that by moving it, it is possible to focus on a sample surface and to focus on interference fringes generated on the sample surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135116U JPH085449Y2 (en) | 1988-10-17 | 1988-10-17 | microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988135116U JPH085449Y2 (en) | 1988-10-17 | 1988-10-17 | microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0255211U true JPH0255211U (en) | 1990-04-20 |
| JPH085449Y2 JPH085449Y2 (en) | 1996-02-14 |
Family
ID=31394463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988135116U Expired - Lifetime JPH085449Y2 (en) | 1988-10-17 | 1988-10-17 | microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085449Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59111611A (en) * | 1982-12-17 | 1984-06-27 | Matsushita Electric Ind Co Ltd | Automatic focusing device |
-
1988
- 1988-10-17 JP JP1988135116U patent/JPH085449Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59111611A (en) * | 1982-12-17 | 1984-06-27 | Matsushita Electric Ind Co Ltd | Automatic focusing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH085449Y2 (en) | 1996-02-14 |
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