JPH0254237U - - Google Patents

Info

Publication number

JPH0254237U

JPH0254237U JP13416588U JP13416588U JPH0254237U JP H0254237 U JPH0254237 U JP H0254237U JP 13416588 U JP13416588 U JP 13416588U JP 13416588 U JP13416588 U JP 13416588U JP H0254237 U JPH0254237 U JP H0254237U

Authority

JP

Japan

Prior art keywords

oxide film

semiconductor wafer

field oxide

wafer

flatten

Prior art date

1988-10-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 238000009413 insulation Methods 0.000 claims 1
• 238000002955 isolation Methods 0.000 claims 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1